EP3557072A1 - Surveillance d'un dispositif de palier d'une pompe à vide - Google Patents

Surveillance d'un dispositif de palier d'une pompe à vide Download PDF

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Publication number
EP3557072A1
EP3557072A1 EP19159776.4A EP19159776A EP3557072A1 EP 3557072 A1 EP3557072 A1 EP 3557072A1 EP 19159776 A EP19159776 A EP 19159776A EP 3557072 A1 EP3557072 A1 EP 3557072A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
operating
bearing
bearing device
parameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19159776.4A
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German (de)
English (en)
Other versions
EP3557072B1 (fr
Inventor
Jochen BÖTTCHER
Johannes Schnarr
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19159776.4A priority Critical patent/EP3557072B1/fr
Publication of EP3557072A1 publication Critical patent/EP3557072A1/fr
Priority to JP2020028168A priority patent/JP7239510B2/ja
Application granted granted Critical
Publication of EP3557072B1 publication Critical patent/EP3557072B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump, with at least one pumping stage, which comprises at least one rotor, which is rotatably mounted by means of at least one bearing device.
  • Such vacuum pumps are known in principle and find a wide application, for example in industry and / or in the scientific environment. Not only their (operating) costs, performance or size are significant factors that are important for the respective user. They must also be reliable, as failure can lead to damage to the vacuum equipment to which they are assigned.
  • the vacuum pump has a first sensor device, which is arranged adjacent to the bearing device and with which an operating parameter of the bearing device can be determined directly or indirectly, and a second sensor device, which is arranged at a distance from the bearing device and with which an operating parameter of the vacuum pump , In particular, an operating parameter of a housing of the vacuum pump, can be determined.
  • a control device is provided which is designed and configured to compare the operating parameters of the bearing device and the operating parameters of the vacuum pump with one another and to determine an operating state of the bearing device on the basis of the comparison. In case of damage or just before it gives way the determined operating state often from a characteristic of the respective operating mode normal operating condition. Recognition of such a deviation can then be used to initiate appropriate countermeasures.
  • the determination of the operating parameter of the storage device can be made directly on it itself. However, it is also possible to determine the corresponding parameter in the vicinity of the bearing device, in particular on components which are in close - preferably direct - contact with the bearing device. When determining the parameter in the immediate vicinity of the bearing device, it can be assumed that the specific value essentially corresponds to that which would be determined directly at the bearing device.
  • the second sensor device determines the state of the vacuum pump in a spatial distance in order to obtain at least one further parameter which is not or only slightly influenced by the state of the bearing device.
  • the controller recognizes that the vacuum pump is functioning properly when the two different parameters change coherently within predetermined limits.
  • the pump starts up, an increase in both parameters can be expected.
  • this can be taken as an indication of an imminent bearing damage.
  • other scenarios of the temporal evolution of the parameters are also conceivable, which speak in favor of or against a change in the operating state of the storage facility.
  • more than two sensor devices can also be provided whose measurement data are used to determine the operating state of the bearing device in order to increase the reliability of the analysis and / or to meet particular requirements of the pump.
  • the first and the second sensor device are designed to determine the same measured variable. This facilitates the analysis of the particular data. However, it is basically also conceivable that different physical measured variables are compared in order to detect the operating state of the bearing device.
  • the first and / or the second sensor device comprise a temperature sensor and / or a vibration sensor and / or an acoustic sensor.
  • a damaged or worn bearing often shows Damage to components of the bearing (eg in the case of a ball bearing damage to the raceways of the balls and / or the ball cage), which leads to an increased bearing friction, which in turn reflected in a temperature increase and / or in a change in the vibration behavior of the bearing.
  • the design of the vacuum pump may be optimized to achieve a certain level of thermal conductivity between the temperature sensors. With an optimal thermal resistance between the sensors, the evaluation of the determined temperature spread is simplified.
  • the bearing device may comprise at least one rolling bearing, in particular at least one ball bearing.
  • the concept of the invention is also applicable to other types of bearings, e.g. in plain bearings, can be used.
  • the first sensor device can be arranged such that the operating parameter of a component of the vacuum pump can be determined - directly or indirectly - that the bearing device receives.
  • a temperature sensor is provided which detects the temperature of a bearing holder or of a bearing device adjacent component.
  • the operating parameter of the storage facility can also be measured directly on itself. When detecting the temperature can be used, for example, with a conventional temperature sensor or with an IR sensor. Even vibrations can be recorded indirectly or measured directly at the storage facility.
  • the vacuum pump may comprise an active cooling device, which is provided in particular at least for cooling a component of the vacuum pump whose operating parameters can be determined by the second sensor device.
  • This component may be, for example, a housing component.
  • the bearing device is received by a first component of the vacuum pump, which is formed separately from a second component of the vacuum pump, in particular a housing component (for example a lower part) of the vacuum pump to which the second sensor device is assigned.
  • a first component of the vacuum pump which is formed separately from a second component of the vacuum pump, in particular a housing component (for example a lower part) of the vacuum pump to which the second sensor device is assigned.
  • the first and second components are preferably connected to one another in a thermally conductive manner.
  • the first and the second sensor device or their measuring range are arranged on a component, e.g. on a lower part of the pump.
  • the sensor devices are also spatially spaced in this case, i. the first sensor device is arranged near the bearing, while the second sensor device is arranged remote from the bearing.
  • the present invention further relates to a method for operating a vacuum pump, in particular for operating a vacuum pump according to at least one of the embodiments described above, with at least one pump stage, which comprises at least one rotor which is rotatably supported by at least one bearing device, with a first sensor device, with which an operating parameter of the bearing device is determined directly or indirectly, and with a second sensor device with which an operating parameter of the vacuum pump, in particular an operating parameter of a housing of the vacuum pump, is determined in a distance from the bearing device portion, wherein the operating parameters of the bearing device and the Operating parameters of the vacuum pump are compared with each other and based on the comparison, an operating condition of the bearing device is determined.
  • the comparison may be preceded by data filtering and / or conversion or may include these or similar methods. It may also be provided that stability criteria are taken into account in the data processing and / or analysis. The aim of these measures is, inter alia, that non-relevant (eg short-term) fluctuations in the data, which could draw a wrong picture of the state of the camp, are eliminated.
  • the first sensor device is either arranged so that it can directly measure the operating parameter of the bearing device. But it is also conceivable that the measurement is carried out in the vicinity of the storage facility. Then, it can be assumed that the measured value is substantially equal to that which would be obtained in a direct measurement.
  • the second sensor device should deliver a value of an operating state which is hardly or hardly influenced by the state of the bearing device. It is therefore determined at some distance from the storage facility.
  • the operating parameter of the storage device and the operating parameters of the vacuum pump may be the same physical quantity.
  • the operating parameters of the bearing device and / or the operating parameters of the vacuum pump are a temperature, a measure of mechanical vibrations, in particular a vibration amplitude and / or a vibration frequency, and / or an acoustic parameter.
  • a temperature of the bearing device or an adjacent component that is in direct or direct contact with the bearing device, and a temperature of a portion of a housing of the vacuum pump can be used as the basis for determining the operating state of the bearing device.
  • the comparison of the operating parameter of the bearing device and the operating parameter of the vacuum pump comprises the formation of a comparison parameter.
  • a fault is detected.
  • a parameter space can also be defined which corresponds to a normal or abnormal state.
  • the comparison of the operating parameter of the bearing device and the operating parameter of the vacuum pump may include a formation of a difference of the operating parameters, wherein a fault is detected when exceeding a predefined or learned threshold value of the difference.
  • the comparison can also be a quotient or the like.
  • a warning signal can be issued.
  • the reaction to the occurrence of the accident can be selected depending on the determined severity of the accident.
  • the operating state of the vacuum pump is determined only when the operating parameter of the vacuum pump has reached a static or quasi-static value or value range. For example, the temperature distribution in the vacuum pump oscillates when the pump starts up only after some time.
  • the particular operating parameters of the sensor devices may still provide an image that does not necessarily allow reliable conclusions to be drawn about the actual state of the bearing device.
  • the corresponding analysis is only begun or the corresponding measurement data are taken into account only when the pump has reached a stable state in order to minimize the probability of false alarms.
  • determining the operating state of the vacuum pump further factors may be taken into account, in particular external and / or internal parameters, preferably a running time and / or an age of the vacuum pump, an external mechanical load of the vacuum pump, an external temperature load of the vacuum pump and / or an operating mode of the vacuum pump vacuum pump.
  • the operating parameters of the storage device and / or the vacuum pump are also influenced by factors other than the condition of the storage device and / or e.g. depend on a speed of the pump. Also, an age of the pump, a running time after the last service interval, a "history" of the pump (how long it was operated at what speeds or in which operating modes), an age of the lubricant used or similar. affect the operating parameters during operation of the pump. The same applies to external factors, such as a mechanical load and / or vibration load of the pump and / or a temperature load of the pump.
  • the threshold value described above is adjusted accordingly.
  • the data obtained in determining the operating state of the storage device can also be used to determine a time at which a maintenance of the pump or the storage device should be made.
  • the user can also be given a remaining time of the maintenance interval.
  • the data mentioned can be used to optimize the maintenance, since the maintenance intervals can be adjusted as needed and depending on the intensity of use of the pump.
  • turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected.
  • the gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.
  • the inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally.
  • Housed in the electronics housing 123 are electrical and / or electronic components of the vacuum pump 111, eg for operating an electric motor 125 arranged in the vacuum pump.
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.
  • a flood inlet 133 On the housing 119 of the turbomolecular pump 111, a flood inlet 133, in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as flushing gas connection is furthermore arranged, via which flushing gas for protecting the electric motor 125 (see, for example, US Pat Fig. 3 ) can be brought before the pumped by the pump gas in the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111.
  • two coolant connections 139 are further arranged, wherein one of the coolant connections is provided as an inlet and the other coolant connection as an outlet for coolant, which can be passed for cooling purposes in the vacuum pump.
  • the lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141.
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended.
  • the vacuum pump 111 can be designed so that it can also be put into operation, if it is aligned differently than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.
  • a bearing cap 145 is attached to the bottom 141.
  • mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pumping stages for conveying the process gas pending at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.
  • Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage.
  • the stator disks 157 are held by spacer rings 159 at a desired axial distance from each other.
  • the vacuum pump further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163, forming a radial Holweck gap 171, and forms with it the first Holweck pump stage subsequent to the turbomolecular pumps.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 forming a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and forms with this the third Holweck pumping stage.
  • a radially extending channel may be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • the nested Holweck pump stages are connected in series.
  • the radially inner Holweck rotor sleeve 165 may also be provided a connection channel 179 to the outlet 117.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.
  • a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153.
  • the spray nut 185 is in sliding contact with at least one scraper of a resource storage.
  • the resource storage comprises a plurality of stackable absorbent discs 187 provided with a rolling bearing bearing means 181, e.g. with a lubricant, soaked.
  • the operating medium is transferred by capillary action of the resource storage on the scraper on the rotating sprayer nut 185 and promoted in the direction of increasing outer diameter of the spray nut 185 to the roller bearing 181 through where the centrifugal force along the spray nut 185 eg fulfills a lubricating function.
  • the rolling bearing 181 and the resource storage are enclosed by a trough-shaped insert 189 and the bearing cap 145 in the vacuum pump.
  • the permanent magnet bearing 183 comprises a rotor-side bearing half 191 and a stator-side bearing half 193, which each have a ring stack of several in the axial direction stacked permanent magnetic rings 195, 197 include.
  • the ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153.
  • the rotor-side ring magnets 195 are supported by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are supported by a stator-side support portion 203, which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a lid element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.
  • an emergency bearing 215 which runs empty in the normal operation of the vacuum pump 111 without contact and engages only with an excessive radial deflection of the rotor 149 relative to the stator to a radial stop for the rotor 149th to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation.
  • the radial deflection at which the fishing camp 215 engages is sized large enough so that the fishing camp 215 in normal operation of the vacuum pump is not engaged, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures is prevented under all circumstances.
  • the vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217.
  • On the extending through the motor stator 217 through portion of the rotor shaft 153 may be arranged radially outside or embedded a permanent magnet arrangement.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purge gas, and which may be, for example, air or nitrogen, enter the engine compartment 137.
  • the electric motor 125 can be provided with process gas, e.g. against corrosive fractions of the process gas.
  • the engine compartment 137 may also be evacuated via the pump outlet 117, i. In the engine compartment 137, at least approximately, the vacuum pressure caused by the backing pump connected to the pump outlet 117 prevails.
  • a turbomolecular pump between the rotor hub 161 and a motor space 137 delimiting wall 221 may also be a so-called.
  • labyrinth seal 223 may be provided, in particular to achieve a better seal of the engine compartment 217 against the Holweck pump stages located radially outside.
  • Fig. 6 shows a further embodiment of a turbomolecular pump, in which, however, examples are given areas in which the respective measuring range of the above-described first and the second sensor device is located.
  • at least one temperature sensor (not shown) is provided which is arranged such that it can determine the temperature prevailing in a region T1.
  • the area T1 is associated with the insert 189, which receives the ball bearing 181.
  • a temperature measurement can take place in a region T1 '.
  • the region T1 ' lies in the lower part 121 and is in direct contact with the insert 189.
  • the temperature sensor or sensors measure - directly or indirectly - ie the temperatures prevailing there, which allows direct conclusions about the temperature of the rolling bearing 181, since the regions T1 and T1 'are in spatial proximity to the bearing 181. Also, a temperature measurement directly on a component of the bearing 181, e.g. on the outer ring, is conceivable.
  • a control device of the pump which detects and evaluates the data mentioned, detects this and initiates (automatically) countermeasures (eg warning signal, stopping the pump, changing the operating mode, adjusting the maintenance interval, etc.).
  • the area T2 and the areas T1, T1 ' are thermally coupled to allow temperature compensation in normal operation.
  • a static or quasi-static temperature distribution arises after a certain time at a given load state.
  • the condition of the bearing 181 is not monitored until such a condition has been reached to minimize the risk of false alarms.
  • an active cooling for example, a water cooling, provided, which mainly affects the range T2.
  • the cooling increases the spread between the temperature values measured in the regions T1, T1 'on the one hand and T2 on the other hand, which simplifies the data analysis. From a corresponding cooling device is in Fig. 6 only one coolant port 225 is shown.
  • Exemplary spreads are - depending on the cooling - temperature differences of 1 ° C to 5 ° C in a normal storage condition. For an imminent bearing damage, the spread increases to values of e.g. more than 5 ° C, more than 6 ° C, more than 15 ° C or even greater values.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP19159776.4A 2019-02-27 2019-02-27 Surveillance d'un dispositif de palier d'une pompe à vide Active EP3557072B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP19159776.4A EP3557072B1 (fr) 2019-02-27 2019-02-27 Surveillance d'un dispositif de palier d'une pompe à vide
JP2020028168A JP7239510B2 (ja) 2019-02-27 2020-02-21 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19159776.4A EP3557072B1 (fr) 2019-02-27 2019-02-27 Surveillance d'un dispositif de palier d'une pompe à vide

Publications (2)

Publication Number Publication Date
EP3557072A1 true EP3557072A1 (fr) 2019-10-23
EP3557072B1 EP3557072B1 (fr) 2021-02-24

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JP (1) JP7239510B2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4174321A1 (fr) * 2021-10-29 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide
GB2619964A (en) * 2022-06-24 2023-12-27 Edwards Ltd Method for detection of a bearing condition of a vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62282194A (ja) * 1986-05-30 1987-12-08 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
EP0851127A2 (fr) * 1996-12-27 1998-07-01 VARIAN S.p.A. Procédé et dispositif de diagnostic pour pompes à vide
US20110103934A1 (en) * 2008-07-14 2011-05-05 Yoshinobu Ohtachi Vacuum pump
JP2018159340A (ja) * 2017-03-23 2018-10-11 株式会社島津製作所 真空ポンプの制御装置、およびポンプ装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10306790A (ja) * 1997-05-01 1998-11-17 Daikin Ind Ltd 分子ポンプ
DE102006034478A1 (de) 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
JP6287475B2 (ja) 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62282194A (ja) * 1986-05-30 1987-12-08 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
EP0851127A2 (fr) * 1996-12-27 1998-07-01 VARIAN S.p.A. Procédé et dispositif de diagnostic pour pompes à vide
US20110103934A1 (en) * 2008-07-14 2011-05-05 Yoshinobu Ohtachi Vacuum pump
JP2018159340A (ja) * 2017-03-23 2018-10-11 株式会社島津製作所 真空ポンプの制御装置、およびポンプ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4174321A1 (fr) * 2021-10-29 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide
GB2619964A (en) * 2022-06-24 2023-12-27 Edwards Ltd Method for detection of a bearing condition of a vacuum pump
WO2023247926A1 (fr) * 2022-06-24 2023-12-28 Edwards Limited Procédé de détection d'un état de palier d'une pompe à vide
GB2619964B (en) * 2022-06-24 2024-12-25 Edwards Ltd Method for detection of a bearing condition of a vacuum pump

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JP7239510B2 (ja) 2023-03-14
EP3557072B1 (fr) 2021-02-24
JP2020139504A (ja) 2020-09-03

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