JP2525772Y2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JP2525772Y2
JP2525772Y2 JP1987083114U JP8311487U JP2525772Y2 JP 2525772 Y2 JP2525772 Y2 JP 2525772Y2 JP 1987083114 U JP1987083114 U JP 1987083114U JP 8311487 U JP8311487 U JP 8311487U JP 2525772 Y2 JP2525772 Y2 JP 2525772Y2
Authority
JP
Japan
Prior art keywords
bonding
heater
sample
semiconductor manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987083114U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63191631U (2
Inventor
聡蔵 鳥越
Original Assignee
株式会社 カイジョー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 カイジョー filed Critical 株式会社 カイジョー
Priority to JP1987083114U priority Critical patent/JP2525772Y2/ja
Publication of JPS63191631U publication Critical patent/JPS63191631U/ja
Application granted granted Critical
Publication of JP2525772Y2 publication Critical patent/JP2525772Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/011—Apparatus therefor
    • H10W72/0113—Apparatus for manufacturing die-attach connectors

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP1987083114U 1987-05-29 1987-05-29 半導体製造装置 Expired - Lifetime JP2525772Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987083114U JP2525772Y2 (ja) 1987-05-29 1987-05-29 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987083114U JP2525772Y2 (ja) 1987-05-29 1987-05-29 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS63191631U JPS63191631U (2) 1988-12-09
JP2525772Y2 true JP2525772Y2 (ja) 1997-02-12

Family

ID=30936407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987083114U Expired - Lifetime JP2525772Y2 (ja) 1987-05-29 1987-05-29 半導体製造装置

Country Status (1)

Country Link
JP (1) JP2525772Y2 (2)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208734A (ja) * 1983-05-13 1984-11-27 Hitachi Ltd ペレツトボンデイング装置
JPS6045027A (ja) * 1983-08-23 1985-03-11 Toshiba Corp フレームフイーダ
JPS6231129A (ja) * 1985-08-02 1987-02-10 Mitsubishi Electric Corp 半導体装置組立てボンダ−用ワ−ク加熱装置

Also Published As

Publication number Publication date
JPS63191631U (2) 1988-12-09

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