JPH01149472U - - Google Patents
Info
- Publication number
- JPH01149472U JPH01149472U JP4738988U JP4738988U JPH01149472U JP H01149472 U JPH01149472 U JP H01149472U JP 4738988 U JP4738988 U JP 4738988U JP 4738988 U JP4738988 U JP 4738988U JP H01149472 U JPH01149472 U JP H01149472U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- vacuum chamber
- shaft
- rotation shaft
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims description 3
- 239000002826 coolant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案のサセプタ回転軸冷却構造を持
つ気相成長装置の縦断面図。第２図はサセプタの
下軸の近傍のみの拡大縦断面図。第３図は本考案
（実線）と従来例（破線）の装置に於けるサセプ
タ回転軸の温度測定結果を示すグラフ。
１……真空チヤンバ、２……サセプタ、３……
ヒータ、４……ウエハ、５……サセプタ上軸、６
……サセプタ下軸、７……継手、８……回転駆動
系、９……回転導入軸、１０，１１……ベベルギ
ヤ、１２，１３……軸受、１４……スラスト軸受
、１５……チヤンバ底板、１６……冷却用パイプ
、１７……ギヤケース、１８，１９……支持環、
２０……原料ガス供給系、２１……半球体、２２
……冷却水パイプ、２３……冷却水ジヤケツト、
２４……冷却水入口、２５……冷却水出口、３０
……フランジ、３１……フランジ、３２……ボル
ト、３３……外筒、３４……内筒、３５……ヒー
タ電流導入端子、３６……排気口。
FIG. 1 is a longitudinal sectional view of a vapor phase growth apparatus having a susceptor rotating shaft cooling structure according to the present invention. FIG. 2 is an enlarged vertical cross-sectional view of only the vicinity of the lower axis of the susceptor. FIG. 3 is a graph showing the temperature measurement results of the susceptor rotating shaft in the devices of the present invention (solid line) and the conventional example (broken line). 1... Vacuum chamber, 2... Susceptor, 3...
Heater, 4... Wafer, 5... Susceptor upper shaft, 6
... Susceptor lower shaft, 7 ... Joint, 8 ... Rotation drive system, 9 ... Rotation introduction shaft, 10, 11 ... Bevel gear, 12, 13 ... Bearing, 14 ... Thrust bearing, 15 ... Chamber bottom plate , 16... Cooling pipe, 17... Gear case, 18, 19... Support ring,
20... Raw material gas supply system, 21... Hemisphere, 22
...Cooling water pipe, 23...Cooling water jacket,
24...Cooling water inlet, 25...Cooling water outlet, 30
... flange, 31 ... flange, 32 ... bolt, 33 ... outer cylinder, 34 ... inner cylinder, 35 ... heater current introduction terminal, 36 ... exhaust port.
Claims (1)
に設けられウエハをほぼ鉛直に支持する筒形のサ
セプタ２と、サセプタ２を加熱するヒータ３と、
サセプタ２を支持するサセプタ回転軸と、サセプ
タ回転軸を回転駆動する回転駆動系８と、真空チ
ヤンバ１の上頂部に原料ガスを供給する原料ガス
供給系２０と、真空チヤンバ１のガスを排気する
ための真空排気装置とを備えた縦型気相成長装置
のサセプタ回転軸に於て、サセプタ回転軸がサセ
プタ上軸５と、サセプタ下軸６とに分かれており
、これらは継手７で結合され、サセプタ下軸６は
軸受によつて回転可能に支持され真空チヤンバ側
方に設けられた回転駆動系８によつて回転し、か
つサセプタ下軸６は中空となつており、この中に
外筒３３と内筒３４よりなる冷却用パイプ１６が
挿入され、外筒３３と内筒３４の中に冷却媒体を
流すことにより、サセプタ下軸６を冷却する事を
特徴とする気相成長装置のサセプタ回転軸冷却構
造。 A vertically elongated vacuum chamber 1, a cylindrical susceptor 2 provided in the vacuum chamber 1 and supporting the wafer almost vertically, and a heater 3 for heating the susceptor 2.
A susceptor rotation shaft that supports the susceptor 2, a rotation drive system 8 that rotationally drives the susceptor rotation shaft, a raw material gas supply system 20 that supplies raw material gas to the top of the vacuum chamber 1, and exhausts the gas in the vacuum chamber 1. In the susceptor rotation shaft of a vertical vapor phase growth apparatus equipped with a vacuum evacuation device for The susceptor lower shaft 6 is rotatably supported by a bearing and rotated by a rotary drive system 8 provided on the side of the vacuum chamber. A susceptor for a vapor phase growth apparatus characterized in that a cooling pipe 16 consisting of a cooling pipe 33 and an inner cylinder 34 is inserted, and the susceptor lower shaft 6 is cooled by flowing a cooling medium into the outer cylinder 33 and the inner cylinder 34. Rotating shaft cooling structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4738988U JPH0619570Y2 (en) | 1988-04-08 | 1988-04-08 | Cooling structure of susceptor rotating shaft for vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4738988U JPH0619570Y2 (en) | 1988-04-08 | 1988-04-08 | Cooling structure of susceptor rotating shaft for vapor phase growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01149472U true JPH01149472U (en) | 1989-10-17 |
| JPH0619570Y2 JPH0619570Y2 (en) | 1994-05-25 |
Family
ID=31273599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4738988U Expired - Lifetime JPH0619570Y2 (en) | 1988-04-08 | 1988-04-08 | Cooling structure of susceptor rotating shaft for vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0619570Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0367062U (en) * | 1989-10-31 | 1991-06-28 |
-
1988
- 1988-04-08 JP JP4738988U patent/JPH0619570Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0367062U (en) * | 1989-10-31 | 1991-06-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0619570Y2 (en) | 1994-05-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS627685B2 (en) | ||
| JPH0426528U (en) | ||
| JPH01136181U (en) | ||
| JPH037752B2 (en) | ||
| JPS6445767U (en) | ||
| JPH0619570Y2 (en) | Cooling structure of susceptor rotating shaft for vapor phase growth equipment | |
| CN213327944U (en) | A temperature-controllable crystal growth device | |
| JPS6170935U (en) | ||
| CN223741102U (en) | Freeze dryer in lipid nanoparticle preparation | |
| JPH0719136Y2 (en) | Cylinder type vapor phase growth equipment | |
| CN217246778U (en) | Evaporator for chemical production | |
| JPH0321844U (en) | ||
| JPH01119057U (en) | ||
| JPS5967929U (en) | Vapor phase growth equipment | |
| JPS62140721U (en) | ||
| JPH0350331U (en) | ||
| JPS6370142U (en) | ||
| JPS63193501U (en) | ||
| JPS62114712U (en) | ||
| JPH0225564U (en) | ||
| JPH01178487U (en) | ||
| JPH059515B2 (en) | ||
| JPH0315626U (en) | ||
| JPS6410080U (en) | ||
| JPH01158099U (en) |