JPH0129059B2 - - Google Patents

Info

Publication number
JPH0129059B2
JPH0129059B2 JP57197202A JP19720282A JPH0129059B2 JP H0129059 B2 JPH0129059 B2 JP H0129059B2 JP 57197202 A JP57197202 A JP 57197202A JP 19720282 A JP19720282 A JP 19720282A JP H0129059 B2 JPH0129059 B2 JP H0129059B2
Authority
JP
Japan
Prior art keywords
capillary
thin metal
metal wire
tip
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57197202A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5986233A (ja
Inventor
Hitoshi Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP57197202A priority Critical patent/JPS5986233A/ja
Publication of JPS5986233A publication Critical patent/JPS5986233A/ja
Publication of JPH0129059B2 publication Critical patent/JPH0129059B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/015—Manufacture or treatment of bond wires
    • H10W72/01551—Changing the shapes of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07141—Means for applying energy, e.g. ovens or lasers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07511—Treating the bonding area before connecting, e.g. by applying flux or cleaning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/075—Connecting or disconnecting of bond wires
    • H10W72/07521—Aligning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/536—Shapes of wire connectors the connected ends being ball-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/531—Shapes of wire connectors
    • H10W72/5363—Shapes of wire connectors the connected ends being wedge-shaped
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/551—Materials of bond wires
    • H10W72/552—Materials of bond wires comprising metals or metalloids, e.g. silver
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Wire Bonding (AREA)
JP57197202A 1982-11-08 1982-11-08 ワイヤボンデイング装置 Granted JPS5986233A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57197202A JPS5986233A (ja) 1982-11-08 1982-11-08 ワイヤボンデイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57197202A JPS5986233A (ja) 1982-11-08 1982-11-08 ワイヤボンデイング装置

Publications (2)

Publication Number Publication Date
JPS5986233A JPS5986233A (ja) 1984-05-18
JPH0129059B2 true JPH0129059B2 (mo) 1989-06-07

Family

ID=16370509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57197202A Granted JPS5986233A (ja) 1982-11-08 1982-11-08 ワイヤボンデイング装置

Country Status (1)

Country Link
JP (1) JPS5986233A (mo)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2725102B2 (ja) * 1991-10-17 1998-03-09 株式会社カイジョー ワイヤボンディング方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501648A (mo) * 1973-05-07 1975-01-09
JPS571238A (en) * 1980-06-03 1982-01-06 Fujitsu Ltd Bonding of wire

Also Published As

Publication number Publication date
JPS5986233A (ja) 1984-05-18

Similar Documents

Publication Publication Date Title
US5976964A (en) Method of improving interconnect of semiconductor device by utilizing a flattened ball bond
US6995469B2 (en) Semiconductor apparatus and fabricating method for the same
JP2003197669A (ja) ボンディング方法及びボンディング装置
JP3049515B2 (ja) ワイヤボンデイング方法
JPH04294552A (ja) ワイヤーボンディング方法
CN112437974B (zh) 半导体裸片的球接合附接
JP2500655B2 (ja) ワイヤ―ボンディング方法及びその装置
JPH0522384B2 (mo)
JPS5986233A (ja) ワイヤボンデイング装置
JPS62123728A (ja) ワイヤボンデイング方法および装置
KR19980027876A (ko) 와이어 본딩 장치의 본더 헤드
JPH07235562A (ja) ウエッジボンディング装置
JP2928590B2 (ja) ワイヤボンディング方法
JPH0458694B2 (mo)
JP2924284B2 (ja) ワイヤボンダ
JPS61234044A (ja) ワイヤボンデイング方法
JPH07130749A (ja) 電子部品のリード接合装置並びに接合方法
JPS5823743B2 (ja) ワイヤボンデイングソウチ
JPS6146052B2 (mo)
JP2765201B2 (ja) 熱圧着用ボンディングヘッド
JPH0831459B2 (ja) ボ−ルバンプ形成方法及びその装置
JPH07283262A (ja) ワイヤボンディング装置
JPS6027182B2 (ja) ワイヤボンデイング装置
JPS5826663B2 (ja) ワイヤボンディング方法
JPH0447972B2 (mo)