JPH0152900B2 - - Google Patents

Info

Publication number
JPH0152900B2
JPH0152900B2 JP58149412A JP14941283A JPH0152900B2 JP H0152900 B2 JPH0152900 B2 JP H0152900B2 JP 58149412 A JP58149412 A JP 58149412A JP 14941283 A JP14941283 A JP 14941283A JP H0152900 B2 JPH0152900 B2 JP H0152900B2
Authority
JP
Japan
Prior art keywords
oxide film
carbon
film
semiconductor substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58149412A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6041243A (ja
Inventor
Tatsuichi Ko
Jiro Ooshima
Takashi Yasujima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58149412A priority Critical patent/JPS6041243A/ja
Publication of JPS6041243A publication Critical patent/JPS6041243A/ja
Publication of JPH0152900B2 publication Critical patent/JPH0152900B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP58149412A 1983-08-16 1983-08-16 半導体装置の製造方法 Granted JPS6041243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58149412A JPS6041243A (ja) 1983-08-16 1983-08-16 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58149412A JPS6041243A (ja) 1983-08-16 1983-08-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6041243A JPS6041243A (ja) 1985-03-04
JPH0152900B2 true JPH0152900B2 (da) 1989-11-10

Family

ID=15474551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58149412A Granted JPS6041243A (ja) 1983-08-16 1983-08-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6041243A (da)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170046U (da) * 1987-04-18 1988-11-04
JPH01259538A (ja) * 1988-04-11 1989-10-17 Agency Of Ind Science & Technol 酸化膜の形成方法

Also Published As

Publication number Publication date
JPS6041243A (ja) 1985-03-04

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