JPH0189953U - - Google Patents

Info

Publication number
JPH0189953U
JPH0189953U JP18621587U JP18621587U JPH0189953U JP H0189953 U JPH0189953 U JP H0189953U JP 18621587 U JP18621587 U JP 18621587U JP 18621587 U JP18621587 U JP 18621587U JP H0189953 U JPH0189953 U JP H0189953U
Authority
JP
Japan
Prior art keywords
crucible
evaporation source
support plate
coil
alumina material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18621587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH047182Y2 (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987186215U priority Critical patent/JPH047182Y2/ja
Publication of JPH0189953U publication Critical patent/JPH0189953U/ja
Application granted granted Critical
Publication of JPH047182Y2 publication Critical patent/JPH047182Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987186215U 1987-12-07 1987-12-07 Expired JPH047182Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987186215U JPH047182Y2 (2) 1987-12-07 1987-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987186215U JPH047182Y2 (2) 1987-12-07 1987-12-07

Publications (2)

Publication Number Publication Date
JPH0189953U true JPH0189953U (2) 1989-06-13
JPH047182Y2 JPH047182Y2 (2) 1992-02-26

Family

ID=31477454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987186215U Expired JPH047182Y2 (2) 1987-12-07 1987-12-07

Country Status (1)

Country Link
JP (1) JPH047182Y2 (2)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725734U (2) * 1980-07-18 1982-02-10
JPS5943875A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発源及びその使用方法
JPS60255971A (ja) * 1984-05-30 1985-12-17 Mitsubishi Electric Corp 薄膜形成装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5725734U (2) * 1980-07-18 1982-02-10
JPS5943875A (ja) * 1982-09-04 1984-03-12 Konishiroku Photo Ind Co Ltd 蒸発源及びその使用方法
JPS60255971A (ja) * 1984-05-30 1985-12-17 Mitsubishi Electric Corp 薄膜形成装置

Also Published As

Publication number Publication date
JPH047182Y2 (2) 1992-02-26

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