JPH02153552A - 半導体素子及びその製造方法 - Google Patents

半導体素子及びその製造方法

Info

Publication number
JPH02153552A
JPH02153552A JP1124486A JP12448689A JPH02153552A JP H02153552 A JPH02153552 A JP H02153552A JP 1124486 A JP1124486 A JP 1124486A JP 12448689 A JP12448689 A JP 12448689A JP H02153552 A JPH02153552 A JP H02153552A
Authority
JP
Japan
Prior art keywords
amorphous silicon
electrode
insulating film
silicon
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1124486A
Other languages
English (en)
Japanese (ja)
Inventor
Yasutaka Nakasaki
中崎　泰貴
Kazuyoshi Hirakawa
一喜 平河
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to DE3927033A priority Critical patent/DE3927033C2/de
Priority to KR1019890011867A priority patent/KR940008564B1/ko
Publication of JPH02153552A publication Critical patent/JPH02153552A/ja
Priority to US07/609,109 priority patent/US5210598A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/49—Adaptable interconnections, e.g. fuses or antifuses
    • H10W20/491—Antifuses, i.e. interconnections changeable from non-conductive to conductive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/38—Devices controlled only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H10D48/381—Multistable devices; Devices having two or more distinct operating states

Landscapes

  • Semiconductor Memories (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Read Only Memory (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1124486A 1988-08-23 1989-05-19 半導体素子及びその製造方法 Pending JPH02153552A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE3927033A DE3927033C2 (de) 1988-08-23 1989-08-16 Halbleiterbauelement mit Antifuse-Elektrodenanordnung und Verfahren zu seiner Herstellung
KR1019890011867A KR940008564B1 (ko) 1988-08-23 1989-08-21 반도체 소자 및 그 제조방법
US07/609,109 US5210598A (en) 1988-08-23 1990-10-31 Semiconductor element having a resistance state transition region of two-layer structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20903488 1988-08-23
JP63-209034 1988-08-23

Publications (1)

Publication Number Publication Date
JPH02153552A true JPH02153552A (ja) 1990-06-13

Family

ID=16566160

Family Applications (2)

Application Number Title Priority Date Filing Date
JP1124486A Pending JPH02153552A (ja) 1988-08-23 1989-05-19 半導体素子及びその製造方法
JP18538789A Expired - Fee Related JPH0756884B2 (ja) 1988-08-23 1989-07-18 半導体素子の製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP18538789A Expired - Fee Related JPH0756884B2 (ja) 1988-08-23 1989-07-18 半導体素子の製造方法

Country Status (2)

Country Link
JP (2) JPH02153552A (ko)
KR (1) KR940008564B1 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04312949A (ja) * 1991-03-26 1992-11-04 Mitsubishi Electric Corp 半導体装置の調整方法
US5485032A (en) * 1992-12-18 1996-01-16 International Business Machines Corporation Antifuse element with electrical or optical programming

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0714024B2 (ja) * 1990-11-29 1995-02-15 川崎製鉄株式会社 マルチチップモジュール
US5625220A (en) * 1991-02-19 1997-04-29 Texas Instruments Incorporated Sublithographic antifuse
US5100827A (en) * 1991-02-27 1992-03-31 At&T Bell Laboratories Buried antifuse
US5557136A (en) * 1991-04-26 1996-09-17 Quicklogic Corporation Programmable interconnect structures and programmable integrated circuits
US5196724A (en) * 1991-04-26 1993-03-23 Quicklogic Corporation Programmable interconnect structures and programmable integrated circuits
US5701027A (en) * 1991-04-26 1997-12-23 Quicklogic Corporation Programmable interconnect structures and programmable integrated circuits
KR970001351B1 (ko) * 1994-03-23 1997-02-05 주식회사 신아스포츠 낚시용 리일의 베일아암 반전장치
US6156588A (en) * 1998-06-23 2000-12-05 Vlsi Technology, Inc. Method of forming anti-fuse structure
JP5525694B2 (ja) * 2007-03-14 2014-06-18 株式会社半導体エネルギー研究所 半導体装置及び半導体装置の作製方法
JP5641840B2 (ja) * 2009-10-01 2014-12-17 株式会社半導体エネルギー研究所 半導体装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04312949A (ja) * 1991-03-26 1992-11-04 Mitsubishi Electric Corp 半導体装置の調整方法
US5485032A (en) * 1992-12-18 1996-01-16 International Business Machines Corporation Antifuse element with electrical or optical programming

Also Published As

Publication number Publication date
KR900004026A (ko) 1990-03-27
JPH02146745A (ja) 1990-06-05
JPH0756884B2 (ja) 1995-06-14
KR940008564B1 (ko) 1994-09-24

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