JPH0238475U - - Google Patents

Info

Publication number
JPH0238475U
JPH0238475U JP11479188U JP11479188U JPH0238475U JP H0238475 U JPH0238475 U JP H0238475U JP 11479188 U JP11479188 U JP 11479188U JP 11479188 U JP11479188 U JP 11479188U JP H0238475 U JPH0238475 U JP H0238475U
Authority
JP
Japan
Prior art keywords
mirror
growth chamber
gate valve
vacuum bellow
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11479188U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11479188U priority Critical patent/JPH0238475U/ja
Publication of JPH0238475U publication Critical patent/JPH0238475U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案の成長室内観察装置の一例を示
す。 １……ミラー、２……マニピユレータ機構、３
……ゲートバルブ、４……ミラー収納室、６……
分子線源、７……シヤツター、８……基板マニピ
ユレータ、９……基板、１０……成長室、１１…
…液体窒素シユラウド、１２……ゲートバルブ、
１３……保持枠、１９……真空ベロー、２０……
ミラー支持杆、２１……機構保持部。

Claims (1)

    【実用新案登録請求の範囲】
  1. ミラーを先端に取り付けたミラー支持杆を、成
    長室より順に続くゲートバルブ、ミラー収納室、
    真空ベローを通して、該真空ベローの他端に設け
    た、前記ミラをＸ，Ｙ，Ｚ軸方向に移動し、且つ
    ミラーを回転できるマニピユレータ機構に連結し
    たことを特徴とする分子線エピタキシヤル成長装
    置の成長室内観察機構。
JP11479188U 1988-08-30 1988-08-30 Pending JPH0238475U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11479188U JPH0238475U (ja) 1988-08-30 1988-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11479188U JPH0238475U (ja) 1988-08-30 1988-08-30

Publications (1)

Publication Number Publication Date
JPH0238475U true JPH0238475U (ja) 1990-03-14

Family

ID=31355865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11479188U Pending JPH0238475U (ja) 1988-08-30 1988-08-30

Country Status (1)

Country Link
JP (1) JPH0238475U (ja)

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