JPH02605U - - Google Patents

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Publication number
JPH02605U
JPH02605U JP7758488U JP7758488U JPH02605U JP H02605 U JPH02605 U JP H02605U JP 7758488 U JP7758488 U JP 7758488U JP 7758488 U JP7758488 U JP 7758488U JP H02605 U JPH02605 U JP H02605U
Authority
JP
Japan
Prior art keywords
light
speckle pattern
measured
diffuse reflection
measurement object
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7758488U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7758488U priority Critical patent/JPH02605U/ja
Publication of JPH02605U publication Critical patent/JPH02605U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第一の実施例を示すスペツク
ルパターン干渉計の概略構成図、第２図は本考案
の第二の実施例を示すスペツクルパターン干渉計
の概略構成図、第３図は従来例のスペツクルパタ
ーン干渉計を示す概略構成図である。 １……レーザ光源、３，３３，３３′……ビー
ムスプリツタ、４……参照粗面、６′……測定対
象物、７……箱体、９……ＴＶカメラ、１２……
偏向板、１９……１／２波長板。

Claims (1)

  1. 【実用新案登録請求の範囲】 レーザ光をビームスプリツタにて参照光と測定
    対象物を照射する光とに分け、前記参照光と測定
    対象物からの反射光とを合成し、その時に生じる
    スペツクルパターンをＴＶカメラで撮像し、測定
    対象物の変形前後のスペツクルパターンの変化を
    干渉縞として表示するようにしたスペツクルパタ
    ーン干渉計において、 測定対象物からの反射光のうち主として直接反
    射成分からなる光を除去し、拡散反射成分からな
    る光のうちの一定の偏向方向を有する光のみを透
    過させる偏向子を設けたことを特徴とするスペツ
    クルパターン干渉計。
JP7758488U 1988-06-10 1988-06-10 Pending JPH02605U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7758488U JPH02605U (ja) 1988-06-10 1988-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7758488U JPH02605U (ja) 1988-06-10 1988-06-10

Publications (1)

Publication Number Publication Date
JPH02605U true JPH02605U (ja) 1990-01-05

Family

ID=31302560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7758488U Pending JPH02605U (ja) 1988-06-10 1988-06-10

Country Status (1)

Country Link
JP (1) JPH02605U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6252803A (ja) * 1985-08-30 1987-03-07 東芝機器株式会社 照明器具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6252803A (ja) * 1985-08-30 1987-03-07 東芝機器株式会社 照明器具

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