JPS6184510U - - Google Patents

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Publication number
JPS6184510U
JPS6184510U JP16794584U JP16794584U JPS6184510U JP S6184510 U JPS6184510 U JP S6184510U JP 16794584 U JP16794584 U JP 16794584U JP 16794584 U JP16794584 U JP 16794584U JP S6184510 U JPS6184510 U JP S6184510U
Authority
JP
Japan
Prior art keywords
measured
photodiodes
critical angle
angle prism
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16794584U
Other languages
English (en)
Other versions
JPH044966Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984167945U priority Critical patent/JPH044966Y2/ja
Publication of JPS6184510U publication Critical patent/JPS6184510U/ja
Application granted granted Critical
Publication of JPH044966Y2 publication Critical patent/JPH044966Y2/ja
Expired legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Description

【図面の簡単な説明】
第１図は接触式の微細形状測定器の１例を示す
略縦断側面図、第２図は光学式の変位検出器の原
理を示す略側面図、第３図は臨界角プリズムの原
理を示す略側面図、第４図は臨界角プリズムによ
り生じる電位差と変位量との関係を示す線図、第
５図は光学式変位検出器の変形例を示す略側面図
、第６図は被測定面を拡大して示す斜視図、第７
図は被測定面上の溝により生じる干渉縞を示す図
、第８〜９図はこの干渉縞の方向に対応してフオ
トダイオードを配列する方向の２例を示しており
、第９図は本考案の場合を示す図である。 １：被測定面、２：触針、３：鉄芯、４：コイ
ル、５，６：ばね、７：レーザダイオード、８：
コリメータレンズ、９：偏光ビームスプリツタ、
１０：４分の１波長板、１１：対物レンズ、１２
：ハーフミラー、１３：第一の臨界角プリズム、
１４：第一のフオトダイオード、１５：第二の臨
界角プリズム、１６：第二のフオトダイオード、
１７：溝、１８：干渉縞。

Claims (1)

    【実用新案登録請求の範囲】
  1. 被測定面で反射したレーザ光を臨界角プリズム
    を介して第一、第二のフオトダイオードに入れ、
    両フオトダイオードに達するレーザ光の強度差に
    より被測定面からの距離を求める微細形状測定器
    に於いて、第一、第二のフオトダイオードの配列
    方向と直角な方向に被測定物を移動自在としたこ
    とを特徴とする微細形状測定器。
JP1984167945U 1984-11-07 1984-11-07 Expired JPH044966Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984167945U JPH044966Y2 (ja) 1984-11-07 1984-11-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984167945U JPH044966Y2 (ja) 1984-11-07 1984-11-07

Publications (2)

Publication Number Publication Date
JPS6184510U true JPS6184510U (ja) 1986-06-04
JPH044966Y2 JPH044966Y2 (ja) 1992-02-13

Family

ID=30725729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984167945U Expired JPH044966Y2 (ja) 1984-11-07 1984-11-07

Country Status (1)

Country Link
JP (1) JPH044966Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6379003A (ja) * 1986-09-22 1988-04-09 Mitsutoyo Corp 形状測定用光プロ−ブ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990007A (ja) * 1982-11-16 1984-05-24 Olympus Optical Co Ltd 光学式寸度測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990007A (ja) * 1982-11-16 1984-05-24 Olympus Optical Co Ltd 光学式寸度測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6379003A (ja) * 1986-09-22 1988-04-09 Mitsutoyo Corp 形状測定用光プロ−ブ

Also Published As

Publication number Publication date
JPH044966Y2 (ja) 1992-02-13

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