JPH03107805U - - Google Patents

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Publication number
JPH03107805U
JPH03107805U JP6300190U JP6300190U JPH03107805U JP H03107805 U JPH03107805 U JP H03107805U JP 6300190 U JP6300190 U JP 6300190U JP 6300190 U JP6300190 U JP 6300190U JP H03107805 U JPH03107805 U JP H03107805U
Authority
JP
Japan
Prior art keywords
electrode terminal
semiconductor device
cavity
stem
ground electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6300190U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6300190U priority Critical patent/JPH03107805U/ja
Publication of JPH03107805U publication Critical patent/JPH03107805U/ja
Pending legal-status Critical Current

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  • Microwave Amplifiers (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案第1の実施例を説明する図、第
2図は本考案第2の実施例を説明する図、第3図
は従来のパツケージの高周波等価回路図、第4図
は従来のパツケージを説明する図である。 4b……第1の接地電極端子、4c……第2の
接地電極端子、4e……接続電極、5b……入力
電極端子、6b……出力電極端子、7……キヤビ
テイ、11,12,13……ボンデイングワイヤ
ー、70……凹状の切り欠き、100……側壁メ
タライズ。
Figure 1 is a diagram explaining the first embodiment of the present invention, Figure 2 is a diagram explaining the second embodiment of the present invention, Figure 3 is a high frequency equivalent circuit diagram of a conventional package, and Figure 4 is a diagram of the conventional package. It is a figure explaining the package of. 4b...First ground electrode terminal, 4c...Second ground electrode terminal, 4e...Connection electrode, 5b...Input electrode terminal, 6b...Output electrode terminal, 7...Cavity, 11, 12, 13 ... Bonding wire, 70 ... Concave notch, 100 ... Side wall metallization.

Claims (1)

【実用新案登録請求の範囲】 1 キヤビテイ構造を有する半導体デバイスパツ
ケージングシステムであつて、 該ステム表面に第1の接地電極端子と入力電極
端子と出力電極端子を有し、 キヤビテイ底面に第2の接地電極端子を有し、 上記キヤビテイの深さがマウントされる半導体
デバイスチツプの厚さと略同一であつて、 上記第1と第2の接地電極端子が電気的に接続
されていることを特徴とする半導体デバイスパツ
ケージングステム。 2 キヤビテイがステム表面の電極端子の間に凹
状に広げて形成されていることを特徴とする請求
項1記載の半導体デバイスパツケージングステム
[Claims for Utility Model Registration] 1. A semiconductor device packaging system having a cavity structure, which has a first ground electrode terminal, an input electrode terminal, and an output electrode terminal on the surface of the stem, and a second ground electrode terminal on the bottom surface of the cavity. It has a ground electrode terminal, the depth of the cavity is approximately the same as the thickness of the semiconductor device chip to be mounted, and the first and second ground electrode terminals are electrically connected. Semiconductor device packaging stem. 2. The semiconductor device packaging stem according to claim 1, wherein the cavity is formed in a concave manner between the electrode terminals on the surface of the stem.
JP6300190U 1989-12-05 1990-06-14 Pending JPH03107805U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6300190U JPH03107805U (en) 1989-12-05 1990-06-14

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP14129589 1989-12-05
JP6300190U JPH03107805U (en) 1989-12-05 1990-06-14

Publications (1)

Publication Number Publication Date
JPH03107805U true JPH03107805U (en) 1991-11-06

Family

ID=31890142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6300190U Pending JPH03107805U (en) 1989-12-05 1990-06-14

Country Status (1)

Country Link
JP (1) JPH03107805U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008029907A (en) * 2006-07-26 2008-02-14 Osada Corporation:Kk Double-sided cleaning method and double-sided cleaning device for planar products

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008029907A (en) * 2006-07-26 2008-02-14 Osada Corporation:Kk Double-sided cleaning method and double-sided cleaning device for planar products

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