JPH0366186B2 - - Google Patents

Info

Publication number
JPH0366186B2
JPH0366186B2 JP59022439A JP2243984A JPH0366186B2 JP H0366186 B2 JPH0366186 B2 JP H0366186B2 JP 59022439 A JP59022439 A JP 59022439A JP 2243984 A JP2243984 A JP 2243984A JP H0366186 B2 JPH0366186 B2 JP H0366186B2
Authority
JP
Japan
Prior art keywords
transport vehicle
clean room
vehicle
air
station
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59022439A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60166554A (ja
Inventor
Hajime Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP59022439A priority Critical patent/JPS60166554A/ja
Publication of JPS60166554A publication Critical patent/JPS60166554A/ja
Publication of JPH0366186B2 publication Critical patent/JPH0366186B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Auxiliary Methods And Devices For Loading And Unloading (AREA)
JP59022439A 1984-02-07 1984-02-07 クリ−ンル−ム用運搬車 Granted JPS60166554A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59022439A JPS60166554A (ja) 1984-02-07 1984-02-07 クリ−ンル−ム用運搬車

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59022439A JPS60166554A (ja) 1984-02-07 1984-02-07 クリ−ンル−ム用運搬車

Publications (2)

Publication Number Publication Date
JPS60166554A JPS60166554A (ja) 1985-08-29
JPH0366186B2 true JPH0366186B2 (2) 1991-10-16

Family

ID=12082731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59022439A Granted JPS60166554A (ja) 1984-02-07 1984-02-07 クリ−ンル−ム用運搬車

Country Status (1)

Country Link
JP (1) JPS60166554A (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01123213U (2) * 1988-02-12 1989-08-22
JP2000203421A (ja) * 1999-01-14 2000-07-25 Nec Yamagata Ltd 無人搬送装置及び搬送方法
JP2009147163A (ja) * 2007-12-14 2009-07-02 Hitachi Plant Technologies Ltd 搬送台車

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910170Y2 (ja) * 1980-01-18 1984-03-30 株式会社ダイフク 集塵装置付荷搬送設備

Also Published As

Publication number Publication date
JPS60166554A (ja) 1985-08-29

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term