JPH0480071U - - Google Patents

Info

Publication number
JPH0480071U
JPH0480071U JP12499790U JP12499790U JPH0480071U JP H0480071 U JPH0480071 U JP H0480071U JP 12499790 U JP12499790 U JP 12499790U JP 12499790 U JP12499790 U JP 12499790U JP H0480071 U JPH0480071 U JP H0480071U
Authority
JP
Japan
Prior art keywords
conductivity type
detection electrode
semiconductor substrate
diffusion
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12499790U
Other languages
English (en)
Other versions
JP2524708Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990124997U priority Critical patent/JP2524708Y2/ja
Publication of JPH0480071U publication Critical patent/JPH0480071U/ja
Application granted granted Critical
Publication of JP2524708Y2 publication Critical patent/JP2524708Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Pressure Sensors (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は本案の一実施例の平面図、
第３図はその他の実施例の略断面図、第４図及び
第５図はさらに他の実施例の平面図、第６図、第
７図及び第８図はそれぞれ従来の例の平面図であ
る。 １……Ｎ型半導体基板、２，３……位置検出用
電極、４……Ｐ型拡散層、５……Ｐ＋型拡散層、
６……チヤネルストツパー、７……Ｎ＋型拡散層
、８……裏面電極、９……ＳｉＯ２膜。

Claims (1)

    【実用新案登録請求の範囲】
  1. 第一の導電型の半導体基板の表面の両端に設け
    られた信号検出用電極と、これらの電極間を接続
    する前記の基板の表面に形成された複数の空間を
    有する第二の導電型の拡散層とを有するポジシヨ
    ンセンサ。
JP1990124997U 1990-11-26 1990-11-26 ポジションセンサ Expired - Fee Related JP2524708Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990124997U JP2524708Y2 (ja) 1990-11-26 1990-11-26 ポジションセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990124997U JP2524708Y2 (ja) 1990-11-26 1990-11-26 ポジションセンサ

Publications (2)

Publication Number Publication Date
JPH0480071U true JPH0480071U (ja) 1992-07-13
JP2524708Y2 JP2524708Y2 (ja) 1997-02-05

Family

ID=31872622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990124997U Expired - Fee Related JP2524708Y2 (ja) 1990-11-26 1990-11-26 ポジションセンサ

Country Status (1)

Country Link
JP (1) JP2524708Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917288A (ja) * 1982-07-20 1984-01-28 Hamamatsu Tv Kk 入射位置検出用半導体装置
JPS59127883A (ja) * 1983-01-12 1984-07-23 Matsushita Electronics Corp 感光半導体装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917288A (ja) * 1982-07-20 1984-01-28 Hamamatsu Tv Kk 入射位置検出用半導体装置
JPS59127883A (ja) * 1983-01-12 1984-07-23 Matsushita Electronics Corp 感光半導体装置

Also Published As

Publication number Publication date
JP2524708Y2 (ja) 1997-02-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees