JPH0531299B2 - - Google Patents

Info

Publication number
JPH0531299B2
JPH0531299B2 JP6076483A JP6076483A JPH0531299B2 JP H0531299 B2 JPH0531299 B2 JP H0531299B2 JP 6076483 A JP6076483 A JP 6076483A JP 6076483 A JP6076483 A JP 6076483A JP H0531299 B2 JPH0531299 B2 JP H0531299B2
Authority
JP
Japan
Prior art keywords
wiring
check
forming
hole
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6076483A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59188144A (ja
Inventor
Tooru Inaba
Tatsutoshi Takagi
Tokio Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6076483A priority Critical patent/JPS59188144A/ja
Publication of JPS59188144A publication Critical patent/JPS59188144A/ja
Publication of JPH0531299B2 publication Critical patent/JPH0531299B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6076483A 1983-04-08 1983-04-08 多層配線の形成法 Granted JPS59188144A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6076483A JPS59188144A (ja) 1983-04-08 1983-04-08 多層配線の形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6076483A JPS59188144A (ja) 1983-04-08 1983-04-08 多層配線の形成法

Publications (2)

Publication Number Publication Date
JPS59188144A JPS59188144A (ja) 1984-10-25
JPH0531299B2 true JPH0531299B2 (de) 1993-05-12

Family

ID=13151666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6076483A Granted JPS59188144A (ja) 1983-04-08 1983-04-08 多層配線の形成法

Country Status (1)

Country Link
JP (1) JPS59188144A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2890442B2 (ja) * 1989-02-27 1999-05-17 日本電気株式会社 半導体装置のコンタクトホールの目ずれ検査方法
KR100333368B1 (ko) * 1995-09-13 2002-09-04 주식회사 하이닉스반도체 반도체소자의결함체크를위한테스트패턴

Also Published As

Publication number Publication date
JPS59188144A (ja) 1984-10-25

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