JPH0535865B2 - - Google Patents

Info

Publication number
JPH0535865B2
JPH0535865B2 JP61156411A JP15641186A JPH0535865B2 JP H0535865 B2 JPH0535865 B2 JP H0535865B2 JP 61156411 A JP61156411 A JP 61156411A JP 15641186 A JP15641186 A JP 15641186A JP H0535865 B2 JPH0535865 B2 JP H0535865B2
Authority
JP
Japan
Prior art keywords
resist
polymer
layer
molecular weight
added
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61156411A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6312608A (ja
Inventor
Kazuhide Saigo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61156411A priority Critical patent/JPS6312608A/ja
Publication of JPS6312608A publication Critical patent/JPS6312608A/ja
Publication of JPH0535865B2 publication Critical patent/JPH0535865B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • ing And Chemical Polishing (AREA)
JP61156411A 1986-07-02 1986-07-02 レジスト材料 Granted JPS6312608A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61156411A JPS6312608A (ja) 1986-07-02 1986-07-02 レジスト材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61156411A JPS6312608A (ja) 1986-07-02 1986-07-02 レジスト材料

Publications (2)

Publication Number Publication Date
JPS6312608A JPS6312608A (ja) 1988-01-20
JPH0535865B2 true JPH0535865B2 (it) 1993-05-27

Family

ID=15627159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61156411A Granted JPS6312608A (ja) 1986-07-02 1986-07-02 レジスト材料

Country Status (1)

Country Link
JP (1) JPS6312608A (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0632005Y2 (ja) * 1990-11-02 1994-08-24 日本パフ株式会社 化粧用スポンジパフ

Also Published As

Publication number Publication date
JPS6312608A (ja) 1988-01-20

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