JPS6312608A - レジスト材料 - Google Patents

レジスト材料

Info

Publication number
JPS6312608A
JPS6312608A JP61156411A JP15641186A JPS6312608A JP S6312608 A JPS6312608 A JP S6312608A JP 61156411 A JP61156411 A JP 61156411A JP 15641186 A JP15641186 A JP 15641186A JP S6312608 A JPS6312608 A JP S6312608A
Authority
JP
Japan
Prior art keywords
resist
polymer
pattern
layer
silicon atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61156411A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535865B2 (it
Inventor
Kazuhide Saigo
斉郷　和秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP61156411A priority Critical patent/JPS6312608A/ja
Publication of JPS6312608A publication Critical patent/JPS6312608A/ja
Publication of JPH0535865B2 publication Critical patent/JPH0535865B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • ing And Chemical Polishing (AREA)
JP61156411A 1986-07-02 1986-07-02 レジスト材料 Granted JPS6312608A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61156411A JPS6312608A (ja) 1986-07-02 1986-07-02 レジスト材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61156411A JPS6312608A (ja) 1986-07-02 1986-07-02 レジスト材料

Publications (2)

Publication Number Publication Date
JPS6312608A true JPS6312608A (ja) 1988-01-20
JPH0535865B2 JPH0535865B2 (it) 1993-05-27

Family

ID=15627159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61156411A Granted JPS6312608A (ja) 1986-07-02 1986-07-02 レジスト材料

Country Status (1)

Country Link
JP (1) JPS6312608A (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473313U (it) * 1990-11-02 1992-06-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473313U (it) * 1990-11-02 1992-06-26

Also Published As

Publication number Publication date
JPH0535865B2 (it) 1993-05-27

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