JPH0547977B2 - - Google Patents

Info

Publication number
JPH0547977B2
JPH0547977B2 JP1016382A JP1638289A JPH0547977B2 JP H0547977 B2 JPH0547977 B2 JP H0547977B2 JP 1016382 A JP1016382 A JP 1016382A JP 1638289 A JP1638289 A JP 1638289A JP H0547977 B2 JPH0547977 B2 JP H0547977B2
Authority
JP
Japan
Prior art keywords
etching
film
psg
thermal oxide
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1016382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01230238A (ja
Inventor
Jun Kanamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1638289A priority Critical patent/JPH01230238A/ja
Publication of JPH01230238A publication Critical patent/JPH01230238A/ja
Publication of JPH0547977B2 publication Critical patent/JPH0547977B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1638289A 1989-01-27 1989-01-27 ドライエッチング方法 Granted JPH01230238A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1638289A JPH01230238A (ja) 1989-01-27 1989-01-27 ドライエッチング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1638289A JPH01230238A (ja) 1989-01-27 1989-01-27 ドライエッチング方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56049266A Division JPS57164529A (en) 1981-04-03 1981-04-03 Dry etching method

Publications (2)

Publication Number Publication Date
JPH01230238A JPH01230238A (ja) 1989-09-13
JPH0547977B2 true JPH0547977B2 (fr) 1993-07-20

Family

ID=11914731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1638289A Granted JPH01230238A (ja) 1989-01-27 1989-01-27 ドライエッチング方法

Country Status (1)

Country Link
JP (1) JPH01230238A (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5480685A (en) * 1977-12-09 1979-06-27 Chiyou Uru Esu Ai Gijiyutsu Ke Dry etching method

Also Published As

Publication number Publication date
JPH01230238A (ja) 1989-09-13

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