JPH0574939B2 - - Google Patents

Info

Publication number
JPH0574939B2
JPH0574939B2 JP23020285A JP23020285A JPH0574939B2 JP H0574939 B2 JPH0574939 B2 JP H0574939B2 JP 23020285 A JP23020285 A JP 23020285A JP 23020285 A JP23020285 A JP 23020285A JP H0574939 B2 JPH0574939 B2 JP H0574939B2
Authority
JP
Japan
Prior art keywords
voltage element
crystal silicon
groove
single crystal
depth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP23020285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6288334A (ja
Inventor
Toshasu Matsushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP23020285A priority Critical patent/JPS6288334A/ja
Publication of JPS6288334A publication Critical patent/JPS6288334A/ja
Publication of JPH0574939B2 publication Critical patent/JPH0574939B2/ja
Granted legal-status Critical Current

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  • Element Separation (AREA)
JP23020285A 1985-10-15 1985-10-15 誘電体絶縁分離基板の製造方法 Granted JPS6288334A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23020285A JPS6288334A (ja) 1985-10-15 1985-10-15 誘電体絶縁分離基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23020285A JPS6288334A (ja) 1985-10-15 1985-10-15 誘電体絶縁分離基板の製造方法

Publications (2)

Publication Number Publication Date
JPS6288334A JPS6288334A (ja) 1987-04-22
JPH0574939B2 true JPH0574939B2 (de) 1993-10-19

Family

ID=16904177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23020285A Granted JPS6288334A (ja) 1985-10-15 1985-10-15 誘電体絶縁分離基板の製造方法

Country Status (1)

Country Link
JP (1) JPS6288334A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63268253A (ja) * 1987-04-24 1988-11-04 Matsushita Electric Works Ltd 絶縁層分離基板およびその製法
US6833602B1 (en) * 2002-09-06 2004-12-21 Lattice Semiconductor Corporation Device having electrically isolated low voltage and high voltage regions and process for fabricating the device

Also Published As

Publication number Publication date
JPS6288334A (ja) 1987-04-22

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