JPH0581068B2 - - Google Patents

Info

Publication number
JPH0581068B2
JPH0581068B2 JP61148286A JP14828686A JPH0581068B2 JP H0581068 B2 JPH0581068 B2 JP H0581068B2 JP 61148286 A JP61148286 A JP 61148286A JP 14828686 A JP14828686 A JP 14828686A JP H0581068 B2 JPH0581068 B2 JP H0581068B2
Authority
JP
Japan
Prior art keywords
melting point
high melting
gate electrode
heat
metals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61148286A
Other languages
English (en)
Japanese (ja)
Other versions
JPS636873A (ja
Inventor
Shinichiro Takatani
Naoyuki Matsuoka
Junji Shigeta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14828686A priority Critical patent/JPS636873A/ja
Publication of JPS636873A publication Critical patent/JPS636873A/ja
Publication of JPH0581068B2 publication Critical patent/JPH0581068B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP14828686A 1986-06-26 1986-06-26 半導体装置 Granted JPS636873A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14828686A JPS636873A (ja) 1986-06-26 1986-06-26 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14828686A JPS636873A (ja) 1986-06-26 1986-06-26 半導体装置

Publications (2)

Publication Number Publication Date
JPS636873A JPS636873A (ja) 1988-01-12
JPH0581068B2 true JPH0581068B2 (de) 1993-11-11

Family

ID=15449371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14828686A Granted JPS636873A (ja) 1986-06-26 1986-06-26 半導体装置

Country Status (1)

Country Link
JP (1) JPS636873A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63148679A (ja) * 1986-12-12 1988-06-21 Nec Corp 電極

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6081860A (ja) * 1983-10-11 1985-05-09 Matsushita Electric Ind Co Ltd シヨツトキ−障壁半導体装置

Also Published As

Publication number Publication date
JPS636873A (ja) 1988-01-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term