JPH0648855Y2 - 半導体ウエ−ハ用ボ−ト - Google Patents

半導体ウエ−ハ用ボ−ト

Info

Publication number
JPH0648855Y2
JPH0648855Y2 JP1985159420U JP15942085U JPH0648855Y2 JP H0648855 Y2 JPH0648855 Y2 JP H0648855Y2 JP 1985159420 U JP1985159420 U JP 1985159420U JP 15942085 U JP15942085 U JP 15942085U JP H0648855 Y2 JPH0648855 Y2 JP H0648855Y2
Authority
JP
Japan
Prior art keywords
wafer
boat
support rod
groove bottom
peripheral edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985159420U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6268235U (mo
Inventor
博至 木村
隆昭 宗近
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP1985159420U priority Critical patent/JPH0648855Y2/ja
Publication of JPS6268235U publication Critical patent/JPS6268235U/ja
Application granted granted Critical
Publication of JPH0648855Y2 publication Critical patent/JPH0648855Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1985159420U 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト Expired - Lifetime JPH0648855Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985159420U JPH0648855Y2 (ja) 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985159420U JPH0648855Y2 (ja) 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト

Publications (2)

Publication Number Publication Date
JPS6268235U JPS6268235U (mo) 1987-04-28
JPH0648855Y2 true JPH0648855Y2 (ja) 1994-12-12

Family

ID=31083832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985159420U Expired - Lifetime JPH0648855Y2 (ja) 1985-10-18 1985-10-18 半導体ウエ−ハ用ボ−ト

Country Status (1)

Country Link
JP (1) JPH0648855Y2 (mo)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130419A (ja) * 1983-01-17 1984-07-27 Tekunisuko:Kk 拡散治具等の製法
JPS6022314A (ja) * 1983-07-19 1985-02-04 Toshiba Corp 半導体基板用ボ−ト

Also Published As

Publication number Publication date
JPS6268235U (mo) 1987-04-28

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