JPH09170589A - ターボ分子ポンプ - Google Patents

ターボ分子ポンプ

Info

Publication number: JPH09170589A
Authority: JP; Japan
Prior art keywords: pumping; pump; channel; rotor; stator
Prior art date: 1995-11-10
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP8312612A

Other languages

English (en)

Japanese (ja)

Other versions

JPH09170589A5 (2

Inventor

Roberto Cerruti

ロベルト・セルルーティ

Giampaolo Levi

ジャイアンパオロ・レヴィ

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Varian Medical Systems Inc

Original Assignee

Varian Associates Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-11-10

Filing date

1996-11-11

Publication date

1997-06-30

1996-11-11 Application filed by Varian Associates Inc filed Critical Varian Associates Inc

1997-06-30 Publication of JPH09170589A publication Critical patent/JPH09170589A/ja

2004-09-02 Publication of JPH09170589A5 publication Critical patent/JPH09170589A5/ja

Status Pending legal-status Critical Current

Links

238000005086 pumping Methods 0.000 claims abstract description 85
230000000712 assembly Effects 0.000 claims abstract 5
238000000429 assembly Methods 0.000 claims abstract 5
239000007789 gas Substances 0.000 claims description 45
238000007789 sealing Methods 0.000 claims description 15
239000011261 inert gas Substances 0.000 claims description 11
239000007858 starting material Substances 0.000 claims description 4
230000006835 compression Effects 0.000 abstract description 9
238000007906 compression Methods 0.000 abstract description 9
238000004519 manufacturing process Methods 0.000 description 8
230000000694 effects Effects 0.000 description 5
239000004065 semiconductor Substances 0.000 description 4
238000005260 corrosion Methods 0.000 description 3
230000007797 corrosion Effects 0.000 description 3
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
238000000034 method Methods 0.000 description 2
239000000203 mixture Substances 0.000 description 2
230000003068 static effect Effects 0.000 description 2
229910000831 Steel Inorganic materials 0.000 description 1
230000009471 action Effects 0.000 description 1
230000004888 barrier function Effects 0.000 description 1
239000003518 caustics Substances 0.000 description 1
230000008859 change Effects 0.000 description 1
238000011109 contamination Methods 0.000 description 1
239000013256 coordination polymer Substances 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
238000001312 dry etching Methods 0.000 description 1
239000000428 dust Substances 0.000 description 1
238000002474 experimental method Methods 0.000 description 1
239000010687 lubricating oil Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
229910052757 nitrogen Inorganic materials 0.000 description 1
230000008569 process Effects 0.000 description 1
238000012545 processing Methods 0.000 description 1
230000009467 reduction Effects 0.000 description 1
230000001105 regulatory effect Effects 0.000 description 1
239000010959 steel Substances 0.000 description 1
238000012360 testing method Methods 0.000 description 1

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Non-Positive Displacement Air Blowers (AREA)
Structures Of Non-Positive Displacement Pumps (AREA)

JP8312612A 1995-11-10 1996-11-11 ターボ分子ポンプ Pending JPH09170589A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
IT95TO000911A IT1281025B1 (it)	1995-11-10	1995-11-10	Pompa turbomolecolare.
IT095A000911		1995-11-10

Publications (2)

Publication Number	Publication Date
JPH09170589A true JPH09170589A (ja)	1997-06-30
JPH09170589A5 JPH09170589A5 (2)	2004-09-02

Family

ID=11413956

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP8312612A Pending JPH09170589A (ja)	1995-11-10	1996-11-11	ターボ分子ポンプ

Country Status (5)

Country	Link
US (1)	US5688106A (2)
EP (1)	EP0773367B1 (2)
JP (1)	JPH09170589A (2)
DE (2)	DE773367T1 (2)
IT (1)	IT1281025B1 (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2010504465A (ja) *	2006-09-22	2010-02-12	エドワーズリミテッド	真空ポンプ
CN104295509A (zh) *	2013-07-15	2015-01-21	普发真空有限公司	真空泵

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB9609281D0 (en) *	1996-05-03	1996-07-10	Boc Group Plc	Improved vacuum pumps
JP3079367B2 (ja) *	1997-10-03	2000-08-21	セイコー精機株式会社	ターボ分子ポンプ
TW504548B (en) *	1998-06-30	2002-10-01	Ebara Corp	Turbo molecular pump
FR2783883B1 (fr) *	1998-09-10	2000-11-10	Cit Alcatel	Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
JP2000183037A (ja) *	1998-12-11	2000-06-30	Tokyo Electron Ltd	真空処理装置
US6328527B1 (en) *	1999-01-08	2001-12-11	Fantom Technologies Inc.	Prandtl layer turbine
JP3788558B2 (ja) *	1999-03-23	2006-06-21	株式会社荏原製作所	ターボ分子ポンプ
JP4104098B2 (ja) *	1999-03-31	2008-06-18	エドワーズ株式会社	真空ポンプ
US6412173B1 (en)	1999-07-26	2002-07-02	Phoenix Analysis And Design Technologies, Inc.	Miniature turbomolecular pump
GB9921983D0 (en) *	1999-09-16	1999-11-17	Boc Group Plc	Improvements in vacuum pumps
US6508631B1 (en)	1999-11-18	2003-01-21	Mks Instruments, Inc.	Radial flow turbomolecular vacuum pump
JP3777498B2 (ja) *	2000-06-23	2006-05-24	株式会社荏原製作所	ターボ分子ポンプ
EP1619395B1 (en) *	2004-07-20	2010-03-10	VARIAN S.p.A.	Rotary vacuum pump, structure and method for the balancing thereof
US20080056886A1 (en) *	2006-08-31	2008-03-06	Varian, S.P.A.	Vacuum pumps with improved pumping channel cross sections
EP2096317B1 (en)	2008-02-27	2012-08-15	Agilent Technologies, Inc.	Method for manufacturing the rotor assembly of a rotating vacuum pump
US8152442B2 (en) *	2008-12-24	2012-04-10	Agilent Technologies, Inc.	Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) *	2008-12-24	2011-12-06	Agilent Technologies, Inc.	Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en)	2012-01-27	2013-07-31	Edwards Ltd	Vacuum pump
EP2757265B1 (en) *	2013-01-22	2016-05-18	Agilent Technologies, Inc.	Spiral pumping stage and vacuum pump incorporating such pumping stage.
DE102013220879A1 (de) *	2013-10-15	2015-04-16	Pfeiffer Vacuum Gmbh	Vakuumpumpe
IT201700075054A1 (it) *	2017-07-04	2017-10-04	Agilent Tech Inc A Delaware Corporation	Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare
CN109441875A (zh) *	2018-12-25	2019-03-08	大连金刚科技有限责任公司	叶轮及气体泵

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3969039A (en) *	1974-08-01	1976-07-13	American Optical Corporation	Vacuum pump
JPS60139098U (ja) *	1984-02-24	1985-09-13	セイコ−精機株式会社	組合せ型軸流分子ポンプ
US4732529A (en) *	1984-02-29	1988-03-22	Shimadzu Corporation	Turbomolecular pump
JPS63255596A (ja) *	1987-04-13	1988-10-21	Ebara Corp	タ−ボ分子ポンプ
EP0408791B1 (de) *	1989-07-20	1994-03-16	Leybold Aktiengesellschaft	Reibungspumpe mit glockenförmigem Rotor
US5238362A (en) *	1990-03-09	1993-08-24	Varian Associates, Inc.	Turbomolecular pump
US5358373A (en) *	1992-04-29	1994-10-25	Varian Associates, Inc.	High performance turbomolecular vacuum pumps
DE4314418A1 (de) *	1993-05-03	1994-11-10	Leybold Ag	Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) *	1994-03-26	1995-09-28	Balzers Pfeiffer Gmbh	Reibungspumpe

1995
- 1995-11-10 IT IT95TO000911A patent/IT1281025B1/it active IP Right Grant
1996
- 1996-01-24 EP EP96200164A patent/EP0773367B1/en not_active Expired - Lifetime
- 1996-01-24 DE DE0773367T patent/DE773367T1/de active Pending
- 1996-01-24 DE DE69600306T patent/DE69600306T2/de not_active Expired - Lifetime
- 1996-11-08 US US08/748,526 patent/US5688106A/en not_active Expired - Fee Related
- 1996-11-11 JP JP8312612A patent/JPH09170589A/ja active Pending

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2010504465A (ja) *	2006-09-22	2010-02-12	エドワーズリミテッド	真空ポンプ
CN104295509A (zh) *	2013-07-15	2015-01-21	普发真空有限公司	真空泵
JP2015017611A (ja) *	2013-07-15	2015-01-29	プファイファー・ヴァキューム・ゲーエムベーハー	真空ポンプ

Also Published As

Publication number	Publication date
DE69600306D1 (de)	1998-06-25
ITTO950911A1 (it)	1997-05-10
IT1281025B1 (it)	1998-02-11
ITTO950911A0 (2)	1995-11-10
DE69600306T2 (de)	1998-09-10
DE773367T1 (de)	1997-09-11
EP0773367A1 (en)	1997-05-14
EP0773367B1 (en)	1998-05-20
US5688106A (en)	1997-11-18

Legal Events

Date	Code	Title	Description
2005-04-06	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20050405
2005-04-06	RD02	Notification of acceptance of power of attorney	Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20050405
2005-04-27	RD04	Notification of resignation of power of attorney	Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20050426
2005-05-13	A521	Request for written amendment filed	Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050512
2006-10-25	A131	Notification of reasons for refusal	Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061024
2007-01-24	A601	Written request for extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20070123
2007-01-29	A602	Written permission of extension of time	Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20070126
2007-07-04	A02	Decision of refusal	Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070703

Publication	Publication Date	Title
JPH09170589A (ja)	1997-06-30	ターボ分子ポンプ
US6705844B2 (en)	2004-03-16	Dynamic seal
CN101517240B (zh)	2013-08-14	分子拖曳泵送机构
US5118251A (en)	1992-06-02	Compound turbomolecular vacuum pump having two rotary shafts and delivering to atmospheric pressure
US6302645B1 (en)	2001-10-16	Labyrinth sealing device, and fluid machine providing the same
US5893702A (en)	1999-04-13	Gas friction pump
JPH09170589A5 (2)	2004-09-02
JP2002515568A (ja)	2002-05-28	ステータとロータを備えた摩擦真空ポンプ
JPH02102385A (ja)	1990-04-13	排気装置
JP2002516959A (ja)	2002-06-11	シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
US6409468B1 (en)	2002-06-25	Turbo-molecular pump
US6179573B1 (en)	2001-01-30	Vacuum pump with inverted motor
GB2475254A (en)	2011-05-18	Vacuum pump with additional leakage path for back leakage
JP2002526720A (ja)	2002-08-20	ステータとロータを有する摩擦真空ポンプ
JPH0389080A (ja)	1991-04-15	真空ポンプ潤滑油のシール機構
JP2000038998A (ja)	2000-02-08	真空ポンプ及び真空装置
JP4567462B2 (ja)	2010-10-20	真空ポンプ排出システム及び真空ポンプ排出装置の作動方法
JP2003013880A (ja)	2003-01-15	ターボ分子ポンプ
JPH02264196A (ja)	1990-10-26	ターボ真空ポンプ
JPH05141389A (ja)	1993-06-08	真空ポンプ
JP2006509953A (ja)	2006-03-23	真空ポンプ排出装置及びその作動方法
JP2897424B2 (ja)	1999-05-31	真空ポンプ
JP2525848Y2 (ja)	1997-02-12	真空ポンプ
JP2002202089A (ja)	2002-07-19	ターボ形ドライ真空ポンプ
JP2004036390A (ja)	2004-02-05	改良型真空ポンプ