JPS51113471A - The manufacturing method of flat-shaped field-effect transistor - Google Patents

The manufacturing method of flat-shaped field-effect transistor

Info

Publication number
JPS51113471A
JPS51113471A JP50037785A JP3778575A JPS51113471A JP S51113471 A JPS51113471 A JP S51113471A JP 50037785 A JP50037785 A JP 50037785A JP 3778575 A JP3778575 A JP 3778575A JP S51113471 A JPS51113471 A JP S51113471A
Authority
JP
Japan
Prior art keywords
flat
manufacturing
effect transistor
shaped field
range
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50037785A
Other languages
Japanese (ja)
Inventor
Mitsutaka Morimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP50037785A priority Critical patent/JPS51113471A/en
Publication of JPS51113471A publication Critical patent/JPS51113471A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)

Abstract

PURPOSE: In flat-shaped MOSFET manufacturing used in RAM and so on, this intends to improve negative resisting pressure to prevent the contact between field doping range and source drain range.
COPYRIGHT: (C)1976,JPO&Japio
JP50037785A 1975-03-31 1975-03-31 The manufacturing method of flat-shaped field-effect transistor Pending JPS51113471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50037785A JPS51113471A (en) 1975-03-31 1975-03-31 The manufacturing method of flat-shaped field-effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50037785A JPS51113471A (en) 1975-03-31 1975-03-31 The manufacturing method of flat-shaped field-effect transistor

Publications (1)

Publication Number Publication Date
JPS51113471A true JPS51113471A (en) 1976-10-06

Family

ID=12507130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50037785A Pending JPS51113471A (en) 1975-03-31 1975-03-31 The manufacturing method of flat-shaped field-effect transistor

Country Status (1)

Country Link
JP (1) JPS51113471A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539626A (en) * 1978-09-14 1980-03-19 Toshiba Corp Field effect semiconductor device
JPH04282878A (en) * 1991-03-11 1992-10-07 Sumitomo Electric Ind Ltd Method for manufacturing superconducting devices that are easy to integrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS472519A (en) * 1970-07-10 1972-02-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS472519A (en) * 1970-07-10 1972-02-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539626A (en) * 1978-09-14 1980-03-19 Toshiba Corp Field effect semiconductor device
JPH04282878A (en) * 1991-03-11 1992-10-07 Sumitomo Electric Ind Ltd Method for manufacturing superconducting devices that are easy to integrate

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