JPS51144192A - Production method of semiconductor intergated circuit - Google Patents

Production method of semiconductor intergated circuit

Info

Publication number
JPS51144192A
JPS51144192A JP50068406A JP6840675A JPS51144192A JP S51144192 A JPS51144192 A JP S51144192A JP 50068406 A JP50068406 A JP 50068406A JP 6840675 A JP6840675 A JP 6840675A JP S51144192 A JPS51144192 A JP S51144192A
Authority
JP
Japan
Prior art keywords
semiconductor
production method
intergated
circuit
intergated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50068406A
Other languages
Japanese (ja)
Inventor
Yoshinori Yukimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50068406A priority Critical patent/JPS51144192A/en
Publication of JPS51144192A publication Critical patent/JPS51144192A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: Oxidation film isolation of isoplanar with high controlability and yield achieved by deep N+ burried section and shallow isolation region of oxidation film.
COPYRIGHT: (C)1976,JPO&Japio
JP50068406A 1975-06-05 1975-06-05 Production method of semiconductor intergated circuit Pending JPS51144192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50068406A JPS51144192A (en) 1975-06-05 1975-06-05 Production method of semiconductor intergated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50068406A JPS51144192A (en) 1975-06-05 1975-06-05 Production method of semiconductor intergated circuit

Publications (1)

Publication Number Publication Date
JPS51144192A true JPS51144192A (en) 1976-12-10

Family

ID=13372759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50068406A Pending JPS51144192A (en) 1975-06-05 1975-06-05 Production method of semiconductor intergated circuit

Country Status (1)

Country Link
JP (1) JPS51144192A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115687A (en) * 1973-03-07 1974-11-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115687A (en) * 1973-03-07 1974-11-05

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