JPS51147283A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS51147283A
JPS51147283A JP7160175A JP7160175A JPS51147283A JP S51147283 A JPS51147283 A JP S51147283A JP 7160175 A JP7160175 A JP 7160175A JP 7160175 A JP7160175 A JP 7160175A JP S51147283 A JPS51147283 A JP S51147283A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
embedded
insulating film
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7160175A
Other languages
Japanese (ja)
Inventor
Kazunari Shirai
Akira Abiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7160175A priority Critical patent/JPS51147283A/en
Publication of JPS51147283A publication Critical patent/JPS51147283A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: A process whereby a thick insulating film with a precise pattern can be embedded in a semiconductor substrate without need of a heat oxidation treatment of a long period of time.
COPYRIGHT: (C)1976,JPO&Japio
JP7160175A 1975-06-13 1975-06-13 Manufacturing process of semiconductor device Pending JPS51147283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7160175A JPS51147283A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7160175A JPS51147283A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147283A true JPS51147283A (en) 1976-12-17

Family

ID=13465329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7160175A Pending JPS51147283A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147283A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011792A (en) * 1973-06-04 1975-02-06
JPS50147878A (en) * 1974-05-17 1975-11-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011792A (en) * 1973-06-04 1975-02-06
JPS50147878A (en) * 1974-05-17 1975-11-27

Similar Documents

Publication Publication Date Title
JPS51123561A (en) Production method of semicondvctor device
JPS5238885A (en) Method for production of semiconductor device
JPS5236468A (en) Shallow diffusion method
JPS5245874A (en) Transfer device of semiconductor substrate holding device
JPS529379A (en) Semiconductor device manufacturing process
JPS5261960A (en) Production of semiconductor device
JPS5232671A (en) Manufacturing process of semiconductor device
JPS52117066A (en) Semiconductor device
JPS5419370A (en) Production of semiconductor devices
JPS5219968A (en) Semiconductor ic manufacturig process
JPS51147252A (en) Manufacturing process of semiconductor device
JPS51111056A (en) Diffused layer forming method
JPS5273673A (en) Production of semiconductor device
JPS51147184A (en) Method of mawufacturing of mosic circuit device
JPS526091A (en) Production method of semiconductor device
JPS5263672A (en) Production of semiconductor device
JPS5240977A (en) Process for production of semiconductor device
JPS51147284A (en) Manufacturing process of semiconductor device
JPS526092A (en) Production method of semiconductor device
JPS51112277A (en) Semiconductor device and its production method
JPS5248974A (en) Process for production of diffusion type semiconductor device
JPS51150286A (en) Production method of semiconductor device
JPS52103963A (en) Semiconductor device and its manufacturing method
JPS5436181A (en) Manufacture for semiconductor device
JPS5375758A (en) Heat processing method of semiconductor device