JPS5247689A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5247689A
JPS5247689A JP12403375A JP12403375A JPS5247689A JP S5247689 A JPS5247689 A JP S5247689A JP 12403375 A JP12403375 A JP 12403375A JP 12403375 A JP12403375 A JP 12403375A JP S5247689 A JPS5247689 A JP S5247689A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
layer
sio
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12403375A
Other languages
Japanese (ja)
Inventor
Kunihiko Naruse
Masateru Kubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12403375A priority Critical patent/JPS5247689A/en
Publication of JPS5247689A publication Critical patent/JPS5247689A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To coat the holes of SiO2 opened on a semiconductor substrate with a composite layer of an SiO2 layer and PSG layer and reopen the holes, thereby obtaining a good contact between the substrate and electrodes.
COPYRIGHT: (C)1977,JPO&Japio
JP12403375A 1975-10-15 1975-10-15 Process for production of semiconductor device Pending JPS5247689A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12403375A JPS5247689A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12403375A JPS5247689A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5247689A true JPS5247689A (en) 1977-04-15

Family

ID=14875353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12403375A Pending JPS5247689A (en) 1975-10-15 1975-10-15 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247689A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225653A (en) * 1982-06-22 1983-12-27 Mitsubishi Electric Corp Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58225653A (en) * 1982-06-22 1983-12-27 Mitsubishi Electric Corp Semiconductor device

Similar Documents

Publication Publication Date Title
JPS5425178A (en) Manufacture for semiconductor device
JPS5249772A (en) Process for production of semiconductor device
JPS5331964A (en) Production of semiconductor substrates
JPS5247689A (en) Process for production of semiconductor device
JPS5240968A (en) Process for production of semiconductor device
JPS5272571A (en) Production of semiconductor device
JPS5258473A (en) Production of semiconductor device
JPS5261960A (en) Production of semiconductor device
JPS5441673A (en) Semiconductor device and its manufacture
JPS5251872A (en) Production of semiconductor device
JPS5368165A (en) Production of semiconductor device
JPS5272186A (en) Production of mis type semiconductor device
JPS52141592A (en) Process of semiconductor device
JPS547867A (en) Manufacture for semiconductor device
JPS5260070A (en) Production of semiconductor device
JPS5275276A (en) Production of semiconductor device
JPS5376752A (en) Production of semionductor device
JPS53129982A (en) Production of mos type semiconductor devices
JPS5227362A (en) Formation method of passivation film
JPS52123880A (en) Semiconductor device and is production
JPS5351978A (en) Manufacture of semiconductor device
JPS522377A (en) Method of forming an electrode on a semiconductor element
JPS51147284A (en) Manufacturing process of semiconductor device
JPS51122386A (en) Manufacturing method of semiconductor device
JPS52141183A (en) Production of semiconductor devices