JPS5366164A - Susceptor for semiconductor wafer processing - Google Patents

Susceptor for semiconductor wafer processing

Info

Publication number
JPS5366164A
JPS5366164A JP14126776A JP14126776A JPS5366164A JP S5366164 A JPS5366164 A JP S5366164A JP 14126776 A JP14126776 A JP 14126776A JP 14126776 A JP14126776 A JP 14126776A JP S5366164 A JPS5366164 A JP S5366164A
Authority
JP
Japan
Prior art keywords
susceptor
semiconductor wafer
wafer processing
sio
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14126776A
Other languages
Japanese (ja)
Inventor
Yushi Kase
Mitsuru Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14126776A priority Critical patent/JPS5366164A/en
Publication of JPS5366164A publication Critical patent/JPS5366164A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To control sufficiently the separation of polluting materials from a susceptor by forming two layers - which include Si3N4 out of poly - Si, SiO2 and Si3N4 - on the SiC layer covering the susceptor main body.
COPYRIGHT: (C)1978,JPO&Japio
JP14126776A 1976-11-26 1976-11-26 Susceptor for semiconductor wafer processing Pending JPS5366164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14126776A JPS5366164A (en) 1976-11-26 1976-11-26 Susceptor for semiconductor wafer processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14126776A JPS5366164A (en) 1976-11-26 1976-11-26 Susceptor for semiconductor wafer processing

Publications (1)

Publication Number Publication Date
JPS5366164A true JPS5366164A (en) 1978-06-13

Family

ID=15287914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14126776A Pending JPS5366164A (en) 1976-11-26 1976-11-26 Susceptor for semiconductor wafer processing

Country Status (1)

Country Link
JP (1) JPS5366164A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631327U (en) * 1986-06-23 1988-01-07
JPS6477930A (en) * 1987-09-18 1989-03-23 Daido Oxygen Cvd device
US6383302B2 (en) * 1997-12-02 2002-05-07 Nec Corporation Apparatus and method for manufacturing semiconductor device
US6770144B2 (en) * 2000-07-25 2004-08-03 International Business Machines Corporation Multideposition SACVD reactor
US6955720B2 (en) * 1999-03-23 2005-10-18 Asml Holding N.V. Plasma deposition of spin chucks to reduce contamination of Silicon wafers
WO2008058270A3 (en) * 2006-11-10 2008-07-10 Saint Gobain Ceramics A susceptor and method of forming a led device using such susceptor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631327U (en) * 1986-06-23 1988-01-07
JPS6477930A (en) * 1987-09-18 1989-03-23 Daido Oxygen Cvd device
US6383302B2 (en) * 1997-12-02 2002-05-07 Nec Corporation Apparatus and method for manufacturing semiconductor device
US6955720B2 (en) * 1999-03-23 2005-10-18 Asml Holding N.V. Plasma deposition of spin chucks to reduce contamination of Silicon wafers
US6770144B2 (en) * 2000-07-25 2004-08-03 International Business Machines Corporation Multideposition SACVD reactor
WO2008058270A3 (en) * 2006-11-10 2008-07-10 Saint Gobain Ceramics A susceptor and method of forming a led device using such susceptor
JP2010509778A (en) * 2006-11-10 2010-03-25 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド Susceptor and method for forming LED device using susceptor

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