JPS5375771A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5375771A
JPS5375771A JP15135676A JP15135676A JPS5375771A JP S5375771 A JPS5375771 A JP S5375771A JP 15135676 A JP15135676 A JP 15135676A JP 15135676 A JP15135676 A JP 15135676A JP S5375771 A JPS5375771 A JP S5375771A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
etching
film
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15135676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS562411B2 (de
Inventor
Soji Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15135676A priority Critical patent/JPS5375771A/ja
Publication of JPS5375771A publication Critical patent/JPS5375771A/ja
Publication of JPS562411B2 publication Critical patent/JPS562411B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP15135676A 1976-12-16 1976-12-16 Manufacture for semiconductor device Granted JPS5375771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15135676A JPS5375771A (en) 1976-12-16 1976-12-16 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15135676A JPS5375771A (en) 1976-12-16 1976-12-16 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5375771A true JPS5375771A (en) 1978-07-05
JPS562411B2 JPS562411B2 (de) 1981-01-20

Family

ID=15516746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15135676A Granted JPS5375771A (en) 1976-12-16 1976-12-16 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5375771A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009056707A1 (de) 2009-04-18 2010-10-21 Alstom Technology Ltd. Dampfkraftwerk mit Solarkollektoren

Also Published As

Publication number Publication date
JPS562411B2 (de) 1981-01-20

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