JPS5437472A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number: JPS5437472A
Authority: JP; Japan
Prior art keywords: semiconductor; manufacture; insulating layer; irradiating; securing
Prior art date: 1977-08-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP10262477A

Other languages

English (en)

Other versions

JPS6146974B2 (ja

Inventor

Hiroshi Yamaguchi

Masao Mitani

Yoshiharu Mori

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-08-29

Filing date

1977-08-29

Publication date

1979-03-19

1977-08-29 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1977-08-29 Priority to JP10262477A priority Critical patent/JPS5437472A/ja

1979-03-19 Publication of JPS5437472A publication Critical patent/JPS5437472A/ja

1986-10-16 Publication of JPS6146974B2 publication Critical patent/JPS6146974B2/ja

Status Granted legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
230000001678 irradiating effect Effects 0.000 abstract 1

Landscapes

Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

JP10262477A 1977-08-29 1977-08-29 Manufacture of semiconductor Granted JPS5437472A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP10262477A JPS5437472A (en)	1977-08-29	1977-08-29	Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP10262477A JPS5437472A (en)	1977-08-29	1977-08-29	Manufacture of semiconductor

Publications (2)

Publication Number	Publication Date
JPS5437472A true JPS5437472A (en)	1979-03-19
JPS6146974B2 JPS6146974B2 (ja)	1986-10-16

Family

ID=14332386

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP10262477A Granted JPS5437472A (en)	1977-08-29	1977-08-29	Manufacture of semiconductor

Country Status (1)

Country	Link
JP (1)	JPS5437472A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS567438A (en) *	1979-06-28	1981-01-26	Mitsubishi Electric Corp	Annealing device for semiconductor which use laser
JPS5930797A (ja) *	1982-08-16	1984-02-18	Shin Etsu Handotai Co Ltd	液相エピタキシヤル成長方法
JPH03135568A (ja) *	1989-06-22	1991-06-10	Digital Equip Corp <Dec>	電子成分等を製造するためにレーザ走査を使用するリトグラフィ技術
JP2002162750A (ja) *	2000-11-27	2002-06-07	Mitsutoyo Corp	露光装置
JP2008112985A (ja) *	2006-10-06	2008-05-15	Semiconductor Energy Lab Co Ltd	露光装置、および当該露光装置を用いた半導体装置の作製方法
JP2018045254A (ja) *	2017-12-11	2018-03-22	株式会社ニコン	パターン描画装置

1977
- 1977-08-29 JP JP10262477A patent/JPS5437472A/ja active Granted

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS567438A (en) *	1979-06-28	1981-01-26	Mitsubishi Electric Corp	Annealing device for semiconductor which use laser
JPS5930797A (ja) *	1982-08-16	1984-02-18	Shin Etsu Handotai Co Ltd	液相エピタキシヤル成長方法
JPH03135568A (ja) *	1989-06-22	1991-06-10	Digital Equip Corp <Dec>	電子成分等を製造するためにレーザ走査を使用するリトグラフィ技術
JP2002162750A (ja) *	2000-11-27	2002-06-07	Mitsutoyo Corp	露光装置
JP2008112985A (ja) *	2006-10-06	2008-05-15	Semiconductor Energy Lab Co Ltd	露光装置、および当該露光装置を用いた半導体装置の作製方法
JP2018045254A (ja) *	2017-12-11	2018-03-22	株式会社ニコン	パターン描画装置

Also Published As

Publication number	Publication date
JPS6146974B2 (ja)	1986-10-16

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