JPS55102469A - Curing of photosensitive resin layer - Google Patents

Curing of photosensitive resin layer

Info

Publication number
JPS55102469A
JPS55102469A JP964379A JP964379A JPS55102469A JP S55102469 A JPS55102469 A JP S55102469A JP 964379 A JP964379 A JP 964379A JP 964379 A JP964379 A JP 964379A JP S55102469 A JPS55102469 A JP S55102469A
Authority
JP
Japan
Prior art keywords
flash
discharge lamp
photosensitive resin
irradiation
pulse width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP964379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112502B2 (de
Inventor
Tatsumi Hiramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP964379A priority Critical patent/JPS55102469A/ja
Publication of JPS55102469A publication Critical patent/JPS55102469A/ja
Publication of JPS6112502B2 publication Critical patent/JPS6112502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Polymerisation Methods In General (AREA)
JP964379A 1979-02-01 1979-02-01 Curing of photosensitive resin layer Granted JPS55102469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP964379A JPS55102469A (en) 1979-02-01 1979-02-01 Curing of photosensitive resin layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP964379A JPS55102469A (en) 1979-02-01 1979-02-01 Curing of photosensitive resin layer

Publications (2)

Publication Number Publication Date
JPS55102469A true JPS55102469A (en) 1980-08-05
JPS6112502B2 JPS6112502B2 (de) 1986-04-08

Family

ID=11725893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP964379A Granted JPS55102469A (en) 1979-02-01 1979-02-01 Curing of photosensitive resin layer

Country Status (1)

Country Link
JP (1) JPS55102469A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548688A (en) * 1983-05-23 1985-10-22 Fusion Semiconductor Systems Hardening of photoresist

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548688A (en) * 1983-05-23 1985-10-22 Fusion Semiconductor Systems Hardening of photoresist

Also Published As

Publication number Publication date
JPS6112502B2 (de) 1986-04-08

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