JPS584139A - パタ−ン形成方法 - Google Patents

パタ−ン形成方法

Info

Publication number
JPS584139A
JPS584139A JP10286081A JP10286081A JPS584139A JP S584139 A JPS584139 A JP S584139A JP 10286081 A JP10286081 A JP 10286081A JP 10286081 A JP10286081 A JP 10286081A JP S584139 A JPS584139 A JP S584139A
Authority
JP
Japan
Prior art keywords
resist
crosslinking agent
sulfonyl azide
positive type
novolak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10286081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6358337B2 (da
Inventor
Kazuo Toda
和男 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10286081A priority Critical patent/JPS584139A/ja
Publication of JPS584139A publication Critical patent/JPS584139A/ja
Publication of JPS6358337B2 publication Critical patent/JPS6358337B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G03F7/012—Macromolecular azides; Macromolecular additives, e.g. binders

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
JP10286081A 1981-06-30 1981-06-30 パタ−ン形成方法 Granted JPS584139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10286081A JPS584139A (ja) 1981-06-30 1981-06-30 パタ−ン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10286081A JPS584139A (ja) 1981-06-30 1981-06-30 パタ−ン形成方法

Publications (2)

Publication Number Publication Date
JPS584139A true JPS584139A (ja) 1983-01-11
JPS6358337B2 JPS6358337B2 (da) 1988-11-15

Family

ID=14338666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10286081A Granted JPS584139A (ja) 1981-06-30 1981-06-30 パタ−ン形成方法

Country Status (1)

Country Link
JP (1) JPS584139A (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6275189A (ja) * 1985-09-30 1987-04-07 三菱重工業株式会社 フランジ継手

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6275189A (ja) * 1985-09-30 1987-04-07 三菱重工業株式会社 フランジ継手

Also Published As

Publication number Publication date
JPS6358337B2 (da) 1988-11-15

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