JPS6358337B2 - - Google Patents
Info
- Publication number
- JPS6358337B2 JPS6358337B2 JP10286081A JP10286081A JPS6358337B2 JP S6358337 B2 JPS6358337 B2 JP S6358337B2 JP 10286081 A JP10286081 A JP 10286081A JP 10286081 A JP10286081 A JP 10286081A JP S6358337 B2 JPS6358337 B2 JP S6358337B2
- Authority
- JP
- Japan
- Prior art keywords
- crosslinking agent
- photoresist
- sensitivity
- exposure
- photoresists
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/008—Azides
- G03F7/012—Macromolecular azides; Macromolecular additives, e.g. binders
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10286081A JPS584139A (ja) | 1981-06-30 | 1981-06-30 | パタ−ン形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10286081A JPS584139A (ja) | 1981-06-30 | 1981-06-30 | パタ−ン形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS584139A JPS584139A (ja) | 1983-01-11 |
| JPS6358337B2 true JPS6358337B2 (da) | 1988-11-15 |
Family
ID=14338666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10286081A Granted JPS584139A (ja) | 1981-06-30 | 1981-06-30 | パタ−ン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS584139A (da) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6275189A (ja) * | 1985-09-30 | 1987-04-07 | 三菱重工業株式会社 | フランジ継手 |
-
1981
- 1981-06-30 JP JP10286081A patent/JPS584139A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS584139A (ja) | 1983-01-11 |
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