JPS60165788A - 薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法 - Google Patents

薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Info

Publication number: JPS60165788A
Authority: JP; Japan
Prior art keywords: film; sputtering; gas; etching; forming
Prior art date: 1984-02-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP2120384A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0422983B2 (2

Inventor

和田　俊朗

勝山　義昭

福田　弘司

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Proterial Ltd

Original Assignee

Sumitomo Special Metals Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-02-07

Filing date

1984-02-07

Publication date

1985-08-28

1984-02-07 Application filed by Sumitomo Special Metals Co Ltd filed Critical Sumitomo Special Metals Co Ltd

1984-02-07 Priority to JP2120384A priority Critical patent/JPS60165788A/ja

1985-08-28 Publication of JPS60165788A publication Critical patent/JPS60165788A/ja

1992-04-21 Publication of JPH0422983B2 publication Critical patent/JPH0422983B2/ja

Status Granted legal-status Critical Current

Links

238000000034 method Methods 0.000 title claims description 11
238000004544 sputter deposition Methods 0.000 claims description 28
239000000758 substrate Substances 0.000 claims description 9
239000010408 film Substances 0.000 description 35
239000007789 gas Substances 0.000 description 17
238000005530 etching Methods 0.000 description 11
238000000576 coating method Methods 0.000 description 9
239000011248 coating agent Substances 0.000 description 8
238000003486 chemical etching Methods 0.000 description 4
239000000919 ceramic Substances 0.000 description 3
238000007796 conventional method Methods 0.000 description 3
239000010409 thin film Substances 0.000 description 3
NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
239000002253 acid Substances 0.000 description 2
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
230000015572 biosynthetic process Effects 0.000 description 2
230000007423 decrease Effects 0.000 description 2
230000002950 deficient Effects 0.000 description 2
238000000151 deposition Methods 0.000 description 2
239000001301 oxygen Substances 0.000 description 2
229910052760 oxygen Inorganic materials 0.000 description 2
230000001681 protective effect Effects 0.000 description 2
230000007261 regionalization Effects 0.000 description 2
229910000147 aluminium phosphate Inorganic materials 0.000 description 1
238000013459 approach Methods 0.000 description 1
210000004013 groin Anatomy 0.000 description 1
230000010354 integration Effects 0.000 description 1
239000002184 metal Substances 0.000 description 1
238000005546 reactive sputtering Methods 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
- C04B41/5031—Alumina

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Inorganic Chemistry (AREA)
Materials Engineering (AREA)
Structural Engineering (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)
Non-Metallic Protective Coatings For Printed Circuits (AREA)
Formation Of Insulating Films (AREA)

JP2120384A 1984-02-07 1984-02-07 薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法 Granted JPS60165788A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2120384A JPS60165788A (ja)	1984-02-07	1984-02-07	薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2120384A JPS60165788A (ja)	1984-02-07	1984-02-07	薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Publications (2)

Publication Number	Publication Date
JPS60165788A true JPS60165788A (ja)	1985-08-28
JPH0422983B2 JPH0422983B2 (2)	1992-04-21

Family

ID=12048418

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2120384A Granted JPS60165788A (ja)	1984-02-07	1984-02-07	薄膜磁気ヘッド用Ａｌ↓２Ｏ↓３被膜の形成方法

Country Status (1)

Country	Link
JP (1)	JPS60165788A (2)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5569254A (en) *	1978-11-17	1980-05-24	Yoichi Murayama	Coloring method for metal surface
JPS5726164A (en) *	1980-07-14	1982-02-12	Uni Shidonii Za	Method and apparatus for reactively spattering surface coating with gradient on substrate

1984
- 1984-02-07 JP JP2120384A patent/JPS60165788A/ja active Granted

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5569254A (en) *	1978-11-17	1980-05-24	Yoichi Murayama	Coloring method for metal surface
JPS5726164A (en) *	1980-07-14	1982-02-12	Uni Shidonii Za	Method and apparatus for reactively spattering surface coating with gradient on substrate

Also Published As

Publication number	Publication date
JPH0422983B2 (2)	1992-04-21

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Legal Events

Date	Code	Title	Description
2004-02-07	EXPY	Cancellation because of completion of term