JPS60238304A - 薄膜形成方法 - Google Patents

薄膜形成方法

Info

Publication number
JPS60238304A
JPS60238304A JP59093409A JP9340984A JPS60238304A JP S60238304 A JPS60238304 A JP S60238304A JP 59093409 A JP59093409 A JP 59093409A JP 9340984 A JP9340984 A JP 9340984A JP S60238304 A JPS60238304 A JP S60238304A
Authority
JP
Japan
Prior art keywords
plasma
film
discharge
thin film
generated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59093409A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518177B2 (2
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59093409A priority Critical patent/JPS60238304A/ja
Publication of JPS60238304A publication Critical patent/JPS60238304A/ja
Publication of JPH0518177B2 publication Critical patent/JPH0518177B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP59093409A 1984-05-10 1984-05-10 薄膜形成方法 Granted JPS60238304A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59093409A JPS60238304A (ja) 1984-05-10 1984-05-10 薄膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59093409A JPS60238304A (ja) 1984-05-10 1984-05-10 薄膜形成方法

Publications (2)

Publication Number Publication Date
JPS60238304A true JPS60238304A (ja) 1985-11-27
JPH0518177B2 JPH0518177B2 (2) 1993-03-11

Family

ID=14081495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59093409A Granted JPS60238304A (ja) 1984-05-10 1984-05-10 薄膜形成方法

Country Status (1)

Country Link
JP (1) JPS60238304A (2)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100416A (ja) * 1985-10-24 1987-05-09 Sumitomo Metal Mining Co Ltd 三塩化砒素の蒸留精製方法
JPS62100413A (ja) * 1985-10-24 1987-05-09 Sumitomo Metal Mining Co Ltd 酸化砒素よりの三塩化砒素の製造方法
JP2005521550A (ja) * 2002-03-28 2005-07-21 プラツソ・テクノロジー・リミテツド プラズマ重合による被膜の調製
JP2007512436A (ja) * 2003-11-20 2007-05-17 アピト コープ．エス．アー． プラズマ薄膜堆積方法
JP2012214815A (ja) * 2003-06-12 2012-11-08 Becton Dickinson & Co 方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62100416A (ja) * 1985-10-24 1987-05-09 Sumitomo Metal Mining Co Ltd 三塩化砒素の蒸留精製方法
JPS62100413A (ja) * 1985-10-24 1987-05-09 Sumitomo Metal Mining Co Ltd 酸化砒素よりの三塩化砒素の製造方法
JP2005521550A (ja) * 2002-03-28 2005-07-21 プラツソ・テクノロジー・リミテツド プラズマ重合による被膜の調製
JP4798949B2 (ja) * 2002-03-28 2011-10-19 プラツソ・テクノロジー・リミテツド プラズマ重合による被膜の調製
JP2012214815A (ja) * 2003-06-12 2012-11-08 Becton Dickinson & Co 方法
JP2007512436A (ja) * 2003-11-20 2007-05-17 アピト コープ．エス．アー． プラズマ薄膜堆積方法

Also Published As

Publication number Publication date
JPH0518177B2 (2) 1993-03-11

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