JPS61268730A - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS61268730A
JPS61268730A JP11067485A JP11067485A JPS61268730A JP S61268730 A JPS61268730 A JP S61268730A JP 11067485 A JP11067485 A JP 11067485A JP 11067485 A JP11067485 A JP 11067485A JP S61268730 A JPS61268730 A JP S61268730A
Authority
JP
Japan
Prior art keywords
plasma
reaction chamber
louver
signal
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11067485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528254B2 (
Inventor
Keiji Fukuhara
福原　啓二
Hiroshi Hayashi
啓 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mazda Motor Corp
Original Assignee
Mazda Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mazda Motor Corp filed Critical Mazda Motor Corp
Priority to JP11067485A priority Critical patent/JPS61268730A/ja
Publication of JPS61268730A publication Critical patent/JPS61268730A/ja
Publication of JPH0528254B2 publication Critical patent/JPH0528254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C2037/90—Measuring, controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP11067485A 1985-05-22 1985-05-22 プラズマ処理装置 Granted JPS61268730A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11067485A JPS61268730A (ja) 1985-05-22 1985-05-22 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11067485A JPS61268730A (ja) 1985-05-22 1985-05-22 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS61268730A true JPS61268730A (ja) 1986-11-28
JPH0528254B2 JPH0528254B2 ( ) 1993-04-23

Family

ID=14541580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11067485A Granted JPS61268730A (ja) 1985-05-22 1985-05-22 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS61268730A ( )

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0658416A3 ( ) * 1993-11-23 1995-07-26 Heinze Dyconex Patente
CN114701154A (zh) * 2021-12-27 2022-07-05 南京苏曼等离子科技有限公司 高分子材料管道的内外表面连续处理装置与方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0658416A3 ( ) * 1993-11-23 1995-07-26 Heinze Dyconex Patente
CN114701154A (zh) * 2021-12-27 2022-07-05 南京苏曼等离子科技有限公司 高分子材料管道的内外表面连续处理装置与方法
CN114701154B (zh) * 2021-12-27 2023-12-01 南京苏曼等离子科技有限公司 高分子材料管道的内外表面连续处理装置与方法

Also Published As

Publication number Publication date
JPH0528254B2 ( ) 1993-04-23

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