JPS62204334U - - Google Patents

Info

Publication number
JPS62204334U
JPS62204334U JP9265286U JP9265286U JPS62204334U JP S62204334 U JPS62204334 U JP S62204334U JP 9265286 U JP9265286 U JP 9265286U JP 9265286 U JP9265286 U JP 9265286U JP S62204334 U JPS62204334 U JP S62204334U
Authority
JP
Japan
Prior art keywords
wafer
wafer chuck
suctioning
outer periphery
edge portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9265286U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9265286U priority Critical patent/JPS62204334U/ja
Publication of JPS62204334U publication Critical patent/JPS62204334U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)

Description

【図面の簡単な説明】
第１図は本考案の第１の実施例の断面図、第２
図は第１図の要部の平面図、第３図は本考案の第
２の実施例の平面図である。 なお図において、１……ウエハチヤツク、２…
…ウエハ、３……吸着口、４……吹き出しノズル
、５……ガラスマスク、６……マスクホルダ、７
……パツキンリング、８……上下駆動機構、９…
…吸着用溝、である。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハチヤツク表面に半導体ウエハを吸着固定
    するための複数個の吸着口と前記ウエハ外周のエ
    ツジ部に向つて吹き出すように斜めに設置した吹
    き出しノズルとを有することを特徴とする半導体
    ウエハ露光装置のウエハチヤツク。
JP9265286U 1986-06-17 1986-06-17 Pending JPS62204334U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9265286U JPS62204334U (ja) 1986-06-17 1986-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9265286U JPS62204334U (ja) 1986-06-17 1986-06-17

Publications (1)

Publication Number Publication Date
JPS62204334U true JPS62204334U (ja) 1987-12-26

Family

ID=30954546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9265286U Pending JPS62204334U (ja) 1986-06-17 1986-06-17

Country Status (1)

Country Link
JP (1) JPS62204334U (ja)

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