JPS62204826A - 気体分離膜 - Google Patents

気体分離膜

Info

Publication number
JPS62204826A
JPS62204826A JP4719986A JP4719986A JPS62204826A JP S62204826 A JPS62204826 A JP S62204826A JP 4719986 A JP4719986 A JP 4719986A JP 4719986 A JP4719986 A JP 4719986A JP S62204826 A JPS62204826 A JP S62204826A
Authority
JP
Japan
Prior art keywords
membrane
gas
helium
plasma
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4719986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423572B2 (mo
Inventor
Shunichi Samejima
鮫島　俊一
Hide Nakamura
秀 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4719986A priority Critical patent/JPS62204826A/ja
Publication of JPS62204826A publication Critical patent/JPS62204826A/ja
Publication of JPH0423572B2 publication Critical patent/JPH0423572B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
JP4719986A 1986-03-06 1986-03-06 気体分離膜 Granted JPS62204826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4719986A JPS62204826A (ja) 1986-03-06 1986-03-06 気体分離膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4719986A JPS62204826A (ja) 1986-03-06 1986-03-06 気体分離膜

Publications (2)

Publication Number Publication Date
JPS62204826A true JPS62204826A (ja) 1987-09-09
JPH0423572B2 JPH0423572B2 (mo) 1992-04-22

Family

ID=12768460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4719986A Granted JPS62204826A (ja) 1986-03-06 1986-03-06 気体分離膜

Country Status (1)

Country Link
JP (1) JPS62204826A (mo)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5246743A (en) * 1991-11-26 1993-09-21 Ube Industries, Ltd. Method of enhancing gas separation performance of an aromatic polyimide membrane
US5773098A (en) * 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6557548B2 (ja) 2015-08-12 2019-08-07 株式会社トプコン 自動測量機

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5773098A (en) * 1991-06-20 1998-06-30 British Technology Group, Ltd. Applying a fluoropolymer film to a body
US5246743A (en) * 1991-11-26 1993-09-21 Ube Industries, Ltd. Method of enhancing gas separation performance of an aromatic polyimide membrane

Also Published As

Publication number Publication date
JPH0423572B2 (mo) 1992-04-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term