JPS6276534U - - Google Patents
Info
- Publication number
- JPS6276534U JPS6276534U JP16878185U JP16878185U JPS6276534U JP S6276534 U JPS6276534 U JP S6276534U JP 16878185 U JP16878185 U JP 16878185U JP 16878185 U JP16878185 U JP 16878185U JP S6276534 U JPS6276534 U JP S6276534U
- Authority
- JP
- Japan
- Prior art keywords
- chemical solution
- opening
- closing lid
- semiconductor device
- solution tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Weting (AREA)
Description
第１図は本考案の一実施例の縦断面図、第２図
は従来の湿式化学処理装置の一例を説明するため
の図である。 １…シリコンウエハー、２…ウエハーホルダー
、３…薬液槽、４…薬液、５…ヒーター、６…蓋
、６ａ…誘導面、７…冷却管、８…水滴。
は従来の湿式化学処理装置の一例を説明するため
の図である。 １…シリコンウエハー、２…ウエハーホルダー
、３…薬液槽、４…薬液、５…ヒーター、６…蓋
、６ａ…誘導面、７…冷却管、８…水滴。
Claims (1)
- 半導体基板を化学処理する薬液を収容した薬液
槽と、該薬液槽の上部開口を閉塞する開閉蓋とを
有する半導体装置の製造装置において、前記開閉
蓋の底面に下向きに突出する中凸状の誘導面を設
けたことを特徴とする半導体装置の製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16878185U JPS6276534U (ja) | 1985-11-01 | 1985-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16878185U JPS6276534U (ja) | 1985-11-01 | 1985-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6276534U true JPS6276534U (ja) | 1987-05-16 |
Family
ID=31101973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16878185U Pending JPS6276534U (ja) | 1985-11-01 | 1985-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6276534U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
-
1985
- 1985-11-01 JP JP16878185U patent/JPS6276534U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100344092B1 (ko) * | 1998-12-29 | 2002-11-23 | 주식회사 에스아이테크 | 반도체 장비의 덮개 구조 |
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