JPS627687B2 - - Google Patents
Info
- Publication number
- JPS627687B2 JPS627687B2 JP53018448A JP1844878A JPS627687B2 JP S627687 B2 JPS627687 B2 JP S627687B2 JP 53018448 A JP53018448 A JP 53018448A JP 1844878 A JP1844878 A JP 1844878A JP S627687 B2 JPS627687 B2 JP S627687B2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- rod
- core tube
- paddle
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1844878A JPS54111758A (en) | 1978-02-22 | 1978-02-22 | Heat treatment unit and boat pick up method from heat treatment unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1844878A JPS54111758A (en) | 1978-02-22 | 1978-02-22 | Heat treatment unit and boat pick up method from heat treatment unit |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59137159A Division JPS6063925A (ja) | 1984-07-04 | 1984-07-04 | ウエハ取扱い方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54111758A JPS54111758A (en) | 1979-09-01 |
| JPS627687B2 true JPS627687B2 (de) | 1987-02-18 |
Family
ID=11971897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1844878A Granted JPS54111758A (en) | 1978-02-22 | 1978-02-22 | Heat treatment unit and boat pick up method from heat treatment unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54111758A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970343U (ja) * | 1982-11-02 | 1984-05-12 | 株式会社日立国際電気 | ソフトランデイング装置 |
| JPS6190247U (de) * | 1984-11-17 | 1986-06-12 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5945219B2 (ja) * | 1976-05-17 | 1984-11-05 | 株式会社日立製作所 | ウェハ処理装置 |
| JPS52154343A (en) * | 1976-06-17 | 1977-12-22 | Matsushita Electric Ind Co Ltd | Production of semiconductor device |
-
1978
- 1978-02-22 JP JP1844878A patent/JPS54111758A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54111758A (en) | 1979-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5162047A (en) | Vertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafers | |
| US4550239A (en) | Automatic plasma processing device and heat treatment device | |
| JPH02297925A (ja) | 縦型ｃｖｄ拡散装置に於けるウェーハ移載方法及び装置 | |
| TW387093B (en) | Methods and apparatus for cleaning, rinsing, and drying wafers | |
| US6318944B1 (en) | Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette | |
| CN1089487C (zh) | 半导体晶片的热处理装置 | |
| JP3322912B2 (ja) | ウエハボート回転装置及びこれを用いた熱処理装置 | |
| JPH0230194B2 (de) | ||
| JPH10204690A (ja) | 自動ウェーハめっき装置 | |
| JPS627687B2 (de) | ||
| KR19980071865A (ko) | 기판처리장치 및 그 보수방법 | |
| JPS6063925A (ja) | ウエハ取扱い方法 | |
| JPH1179388A (ja) | ガラス類枚葉処理装置 | |
| JPS62128523A (ja) | ウエ−ハ収納ボ−トの熱処理炉への搬入出装置 | |
| JPS63244856A (ja) | ウエハボ−トの移送装置 | |
| JPH0648843Y2 (ja) | 半導体処理用移送装置 | |
| CN220509990U (zh) | 一种晶圆自动化换料篮设备 | |
| KR100513421B1 (ko) | 열처리장치의 웨이퍼 이송시스템 | |
| JPH0415714Y2 (de) | ||
| JP2003257985A (ja) | 熱処理装置 | |
| JPH01227451A (ja) | 処理装置 | |
| US5619744A (en) | Film processor | |
| JP2684408B2 (ja) | ウエハ移替え方法 | |
| CN116344398A (zh) | 一种芯片水洗线 | |
| CN114289390A (zh) | 硅料清洗系统 |