JPS64747A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS64747A
JPS64747A JP62155825A JP15582587A JPS64747A JP S64747 A JPS64747 A JP S64747A JP 62155825 A JP62155825 A JP 62155825A JP 15582587 A JP15582587 A JP 15582587A JP S64747 A JPS64747 A JP S64747A
Authority
JP
Japan
Prior art keywords
insulating layer
contact hole
resist
aluminum
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62155825A
Other languages
English (en)
Other versions
JPH01747A (ja
Inventor
Akihisa Oka
Morioki Yasufuku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62155825A priority Critical patent/JPS64747A/ja
Publication of JPH01747A publication Critical patent/JPH01747A/ja
Publication of JPS64747A publication Critical patent/JPS64747A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP62155825A 1987-06-23 1987-06-23 Manufacture of semiconductor device Pending JPS64747A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62155825A JPS64747A (en) 1987-06-23 1987-06-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62155825A JPS64747A (en) 1987-06-23 1987-06-23 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPH01747A JPH01747A (ja) 1989-01-05
JPS64747A true JPS64747A (en) 1989-01-05

Family

ID=15614313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62155825A Pending JPS64747A (en) 1987-06-23 1987-06-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS64747A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08167657A (ja) * 1994-12-14 1996-06-25 Nec Corp 半導体装置の製造方法
JP2007530883A (ja) * 2004-03-26 2007-11-01 ザ ビーオーシー グループ ピーエルシー ギアアセンブリー

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08167657A (ja) * 1994-12-14 1996-06-25 Nec Corp 半導体装置の製造方法
JP2007530883A (ja) * 2004-03-26 2007-11-01 ザ ビーオーシー グループ ピーエルシー ギアアセンブリー

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