JPS64781A - Semiconductor coupling type superconducting circuit device and manufacture thereof - Google Patents
Semiconductor coupling type superconducting circuit device and manufacture thereofInfo
- Publication number
- JPS64781A JPS64781A JP63053967A JP5396788A JPS64781A JP S64781 A JPS64781 A JP S64781A JP 63053967 A JP63053967 A JP 63053967A JP 5396788 A JP5396788 A JP 5396788A JP S64781 A JPS64781 A JP S64781A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor layer
- superconducting
- electrodes
- atoms
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 8
- 230000008878 coupling Effects 0.000 title 1
- 238000010168 coupling process Methods 0.000 title 1
- 238000005859 coupling reaction Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 2
- 229910052796 boron Inorganic materials 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052758 niobium Inorganic materials 0.000 abstract 1
- 239000010955 niobium Substances 0.000 abstract 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000011574 phosphorus Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63053967A JPS64781A (en) | 1987-03-06 | 1988-03-07 | Semiconductor coupling type superconducting circuit device and manufacture thereof |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5233987 | 1987-03-06 | ||
| JP62-52339 | 1987-03-06 | ||
| JP63053967A JPS64781A (en) | 1987-03-06 | 1988-03-07 | Semiconductor coupling type superconducting circuit device and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01781A JPH01781A (ja) | 1989-01-05 |
| JPS64781A true JPS64781A (en) | 1989-01-05 |
Family
ID=26392947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63053967A Pending JPS64781A (en) | 1987-03-06 | 1988-03-07 | Semiconductor coupling type superconducting circuit device and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64781A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5137055A (en) * | 1992-01-14 | 1992-08-11 | Yazaki Corporation | Stop valve |
-
1988
- 1988-03-07 JP JP63053967A patent/JPS64781A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5137055A (en) * | 1992-01-14 | 1992-08-11 | Yazaki Corporation | Stop valve |
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