JPH0152065B2 - - Google Patents

Info

Publication number
JPH0152065B2
JPH0152065B2 JP58118597A JP11859783A JPH0152065B2 JP H0152065 B2 JPH0152065 B2 JP H0152065B2 JP 58118597 A JP58118597 A JP 58118597A JP 11859783 A JP11859783 A JP 11859783A JP H0152065 B2 JPH0152065 B2 JP H0152065B2
Authority
JP
Japan
Prior art keywords
coating liquid
pressure
supply pipe
coating
sealed container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58118597A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6012175A (ja
Inventor
Muneo Nakayama
Akira Hashimoto
Toshihiro Nishimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP58118597A priority Critical patent/JPS6012175A/ja
Publication of JPS6012175A publication Critical patent/JPS6012175A/ja
Publication of JPH0152065B2 publication Critical patent/JPH0152065B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP58118597A 1983-06-30 1983-06-30 塗布液の供給方法 Granted JPS6012175A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58118597A JPS6012175A (ja) 1983-06-30 1983-06-30 塗布液の供給方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58118597A JPS6012175A (ja) 1983-06-30 1983-06-30 塗布液の供給方法

Publications (2)

Publication Number Publication Date
JPS6012175A JPS6012175A (ja) 1985-01-22
JPH0152065B2 true JPH0152065B2 (nl) 1989-11-07

Family

ID=14740511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58118597A Granted JPS6012175A (ja) 1983-06-30 1983-06-30 塗布液の供給方法

Country Status (1)

Country Link
JP (1) JPS6012175A (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0727150U (ja) * 1993-10-07 1995-05-19 大日本スクリーン製造株式会社 シリカ系被膜形成用塗布液吐出装置
KR100807667B1 (ko) * 2002-07-25 2008-03-03 주식회사 포스코 절연코팅용액 공급장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4958775A (nl) * 1972-10-04 1974-06-07
JPS55108741A (en) * 1979-02-15 1980-08-21 Pioneer Electronic Corp Resist coating device
JPS56106451U (nl) * 1980-01-16 1981-08-19

Also Published As

Publication number Publication date
JPS6012175A (ja) 1985-01-22

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