JPH0187171U - - Google Patents
Info
- Publication number
- JPH0187171U JPH0187171U JP18303487U JP18303487U JPH0187171U JP H0187171 U JPH0187171 U JP H0187171U JP 18303487 U JP18303487 U JP 18303487U JP 18303487 U JP18303487 U JP 18303487U JP H0187171 U JPH0187171 U JP H0187171U
- Authority
- JP
- Japan
- Prior art keywords
- growth apparatus
- crystal growth
- single crystal
- melts
- partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 6
- 239000000155 melt Substances 0.000 claims 4
- 239000002994 raw material Substances 0.000 claims 2
- 238000009413 insulation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の模式的縦断面図、第２図は隔
壁部材の斜視図、第３図は同じく縦断面図である
。 １……チヤンバ、２……保温壁、３……坩堝、
４……ヒータ、５……保護筒、７……単結晶、８
……輻射スクリーン、９……隔壁部材、９ａ……
筒状隔壁部、９ｂ……鍔状隔壁部、９ｃ……支持
片。
壁部材の斜視図、第３図は同じく縦断面図である
。 １……チヤンバ、２……保温壁、３……坩堝、
４……ヒータ、５……保護筒、７……単結晶、８
……輻射スクリーン、９……隔壁部材、９ａ……
筒状隔壁部、９ｂ……鍔状隔壁部、９ｃ……支持
片。
Claims (1)
- 成長させるべき単結晶の原料を加熱溶融する坩
堝内に垂下され、融液面下では融液が相通じる状
態で、融液面を含むその上、下にわたつて単結晶
を引上げる内側領域と、原料を供給する外側環状
領域とに区分する筒状隔壁部を備えた隔壁部材を
有する単結晶成長装置において、前記隔壁部材の
筒状隔壁部に、前記外側環状領域の開面上方を覆
うべくその外周から外部上方に傾斜させて張り出
した鍔状隔壁部を設けたことを特徴とする単結晶
成長装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18303487U JPH0523581Y2 (ja) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18303487U JPH0523581Y2 (ja) | 1987-11-30 | 1987-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0187171U true JPH0187171U (ja) | 1989-06-08 |
| JPH0523581Y2 JPH0523581Y2 (ja) | 1993-06-16 |
Family
ID=31474467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18303487U Expired - Lifetime JPH0523581Y2 (ja) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523581Y2 (ja) |
-
1987
- 1987-11-30 JP JP18303487U patent/JPH0523581Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523581Y2 (ja) | 1993-06-16 |