JPH0192750U - - Google Patents

Info

Publication number
JPH0192750U
JPH0192750U JP18876387U JP18876387U JPH0192750U JP H0192750 U JPH0192750 U JP H0192750U JP 18876387 U JP18876387 U JP 18876387U JP 18876387 U JP18876387 U JP 18876387U JP H0192750 U JPH0192750 U JP H0192750U
Authority
JP
Japan
Prior art keywords
chamber
ion implantation
carrier
bake
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18876387U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18876387U priority Critical patent/JPH0192750U/ja
Publication of JPH0192750U publication Critical patent/JPH0192750U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図及び第２図は本考案の第１及び第２の実
施例の上面図である。 １……イオン源、２……イオンビーム分離部、
３……イオン打込み室、４……ウエハー、５……
ウエハー用キヤリア室、６……ウエハーベーク室
、７……ローダー側キヤリア室、８……アンロー
ダー側キヤリア室、９……イオンビーム、１０…
…ホツトプレートオーブン。

Claims (1)

    【実用新案登録請求の範囲】
  1. イオン打込み室と該イオン打込み室に半導体ウ
    エハーを送るキヤリア室とを有するイオン注入装
    置において、前記イオン打込み室と前記キヤリア
    室との間に半導体ウエハーを加熱するためのベー
    ク室を設けたことを特徴とするイオン注入装置。
JP18876387U 1987-12-11 1987-12-11 Pending JPH0192750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18876387U JPH0192750U (ja) 1987-12-11 1987-12-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18876387U JPH0192750U (ja) 1987-12-11 1987-12-11

Publications (1)

Publication Number Publication Date
JPH0192750U true JPH0192750U (ja) 1989-06-19

Family

ID=31479836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18876387U Pending JPH0192750U (ja) 1987-12-11 1987-12-11

Country Status (1)

Country Link
JP (1) JPH0192750U (ja)

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