JPH0210589B2 - - Google Patents

Info

Publication number
JPH0210589B2
JPH0210589B2 JP59169207A JP16920784A JPH0210589B2 JP H0210589 B2 JPH0210589 B2 JP H0210589B2 JP 59169207 A JP59169207 A JP 59169207A JP 16920784 A JP16920784 A JP 16920784A JP H0210589 B2 JPH0210589 B2 JP H0210589B2
Authority
JP
Japan
Prior art keywords
film
resist
forming
insulating film
stencil pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59169207A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6147678A (ja
Inventor
Koji Yamada
Yoshinobu Taruya
Shinichiro Yano
Nobuo Myamoto
Mikio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59169207A priority Critical patent/JPS6147678A/ja
Publication of JPS6147678A publication Critical patent/JPS6147678A/ja
Publication of JPH0210589B2 publication Critical patent/JPH0210589B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP59169207A 1984-08-15 1984-08-15 接合形成用レジストステンシルパタ−ンの作製方法 Granted JPS6147678A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59169207A JPS6147678A (ja) 1984-08-15 1984-08-15 接合形成用レジストステンシルパタ−ンの作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59169207A JPS6147678A (ja) 1984-08-15 1984-08-15 接合形成用レジストステンシルパタ−ンの作製方法

Publications (2)

Publication Number Publication Date
JPS6147678A JPS6147678A (ja) 1986-03-08
JPH0210589B2 true JPH0210589B2 (cs) 1990-03-08

Family

ID=15882185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59169207A Granted JPS6147678A (ja) 1984-08-15 1984-08-15 接合形成用レジストステンシルパタ−ンの作製方法

Country Status (1)

Country Link
JP (1) JPS6147678A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01106482A (ja) * 1987-10-20 1989-04-24 Fujitsu Ltd 超伝導材料構造
US5386971A (en) * 1993-07-22 1995-02-07 Owens-Illinois Closure Inc. Plastic pellet delivery system and method of use

Also Published As

Publication number Publication date
JPS6147678A (ja) 1986-03-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term