JPH0253779B2 - - Google Patents

Info

Publication number
JPH0253779B2
JPH0253779B2 JP53082120A JP8212078A JPH0253779B2 JP H0253779 B2 JPH0253779 B2 JP H0253779B2 JP 53082120 A JP53082120 A JP 53082120A JP 8212078 A JP8212078 A JP 8212078A JP H0253779 B2 JPH0253779 B2 JP H0253779B2
Authority
JP
Japan
Prior art keywords
acid
meth
carbonamide
sulfonamide
compounds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53082120A
Other languages
English (en)
Japanese (ja)
Other versions
JPS559538A (en
Inventor
Kaoru Oomura
Takeo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd filed Critical Asahi Chemical Industry Co Ltd
Priority to JP8212078A priority Critical patent/JPS559538A/ja
Publication of JPS559538A publication Critical patent/JPS559538A/ja
Publication of JPH0253779B2 publication Critical patent/JPH0253779B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0387—Polyamides or polyimides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Formation Of Insulating Films (AREA)
JP8212078A 1978-07-07 1978-07-07 Heat resistant photoresist composition Granted JPS559538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8212078A JPS559538A (en) 1978-07-07 1978-07-07 Heat resistant photoresist composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8212078A JPS559538A (en) 1978-07-07 1978-07-07 Heat resistant photoresist composition

Publications (2)

Publication Number Publication Date
JPS559538A JPS559538A (en) 1980-01-23
JPH0253779B2 true JPH0253779B2 (de) 1990-11-19

Family

ID=13765545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8212078A Granted JPS559538A (en) 1978-07-07 1978-07-07 Heat resistant photoresist composition

Country Status (1)

Country Link
JP (1) JPS559538A (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121740A (ja) * 1984-02-20 1985-06-29 Hitachi Ltd 多層配線構造体
JPS63206740A (ja) * 1987-02-24 1988-08-26 Mitsubishi Gas Chem Co Inc 感光性重合体組成物
JPS63317553A (ja) * 1987-06-22 1988-12-26 Mitsubishi Gas Chem Co Inc ポリアミド酸系感光性組成物
JPH0646302B2 (ja) * 1987-06-22 1994-06-15 株式会社日立製作所 耐熱感光性重合体組成物
EP0430220B1 (de) * 1989-11-30 1997-05-07 Sumitomo Bakelite Company Limited Lichtempfindliche Harzzusammensetzung und ihre Verwendung zur Herstellung eines Halbleiterapparats
JPH0827538B2 (ja) * 1990-07-20 1996-03-21 住友ベークライト株式会社 感光性樹脂組成物
JPH0827536B2 (ja) * 1990-04-17 1996-03-21 住友ベークライト株式会社 感光性樹脂組成物の製造方法
JPH04130323A (ja) * 1990-09-21 1992-05-01 Sumitomo Bakelite Co Ltd 感光性樹脂組成物
JPH0827537B2 (ja) * 1990-07-06 1996-03-21 住友ベークライト株式会社 感光性樹脂組成物
JP2516276B2 (ja) * 1990-09-12 1996-07-24 住友ベークライト株式会社 感光性樹脂組成物
DE4433823A1 (de) 1994-09-22 1996-03-28 Huels Chemische Werke Ag Verfahren zur Herstellung von Ketoverbindungen

Also Published As

Publication number Publication date
JPS559538A (en) 1980-01-23

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