JPH0328049B2 - - Google Patents
Info
- Publication number
- JPH0328049B2 JPH0328049B2 JP56104018A JP10401881A JPH0328049B2 JP H0328049 B2 JPH0328049 B2 JP H0328049B2 JP 56104018 A JP56104018 A JP 56104018A JP 10401881 A JP10401881 A JP 10401881A JP H0328049 B2 JPH0328049 B2 JP H0328049B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- electron beam
- marks
- chip
- mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56104018A JPS586131A (ja) | 1981-07-03 | 1981-07-03 | 電子ビ−ム露光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56104018A JPS586131A (ja) | 1981-07-03 | 1981-07-03 | 電子ビ−ム露光方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS586131A JPS586131A (ja) | 1983-01-13 |
| JPH0328049B2 true JPH0328049B2 (fr) | 1991-04-17 |
Family
ID=14369513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56104018A Granted JPS586131A (ja) | 1981-07-03 | 1981-07-03 | 電子ビ−ム露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS586131A (fr) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5452223A (en) * | 1977-10-03 | 1979-04-24 | Toyota Motor Corp | Exhaust gas recirculating system for operation of internal-combustion engine at high ground |
| JPS5538117U (fr) * | 1978-08-30 | 1980-03-11 |
-
1981
- 1981-07-03 JP JP56104018A patent/JPS586131A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS586131A (ja) | 1983-01-13 |
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