JPH042054U - - Google Patents
Info
- Publication number
- JPH042054U JPH042054U JP4294690U JP4294690U JPH042054U JP H042054 U JPH042054 U JP H042054U JP 4294690 U JP4294690 U JP 4294690U JP 4294690 U JP4294690 U JP 4294690U JP H042054 U JPH042054 U JP H042054U
- Authority
- JP
- Japan
- Prior art keywords
- chip
- integrated circuit
- circuit device
- semiconductor integrated
- active element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000003990 capacitor Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Description
第１図は、本考案による半導体集積回路装置の
一実施例の断面図、第２図ａ〜ｇは第１図に示す
実施例の製造プロセスを示す断面図である。
１……半導体基板、２……バイアホール構造引
き出し電極、３……キヤパシタ上部電極、４……
誘電膜、５……キヤパシタ下部電極、６……フオ
トレジスト、６ａ……リフトオフ用開口パターン
、７……フオトレジスト、７ａ……バイアホール
形成用開口パターン、８……バイアホール、９…
…半導体集積回路装置。
FIG. 1 is a sectional view of an embodiment of a semiconductor integrated circuit device according to the present invention, and FIGS. 2a to 2g are sectional views showing the manufacturing process of the embodiment shown in FIG. 1... Semiconductor substrate, 2... Via hole structure extraction electrode, 3... Capacitor upper electrode, 4...
Dielectric film, 5... Capacitor lower electrode, 6... Photoresist, 6a... Opening pattern for lift-off, 7... Photoresist, 7a... Opening pattern for via hole formation, 8... Via hole, 9...
...Semiconductor integrated circuit device.
Claims (1)
び抵抗パターンを有するとともに、チツプ裏面に
キヤパシタ素子又はインダクタ素子等の受動素子
を有することを特徴とする半導体集積回路装置。 A semiconductor integrated circuit device comprising an active element or an active element and a resistance pattern on the front surface of a semiconductor chip, and a passive element such as a capacitor element or an inductor element on the back surface of the chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4294690U JPH042054U (en) | 1990-04-20 | 1990-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4294690U JPH042054U (en) | 1990-04-20 | 1990-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH042054U true JPH042054U (en) | 1992-01-09 |
Family
ID=31554935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4294690U Pending JPH042054U (en) | 1990-04-20 | 1990-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042054U (en) |
-
1990
- 1990-04-20 JP JP4294690U patent/JPH042054U/ja active Pending