JPH0449807U - - Google Patents

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Publication number
JPH0449807U
JPH0449807U JP9202390U JP9202390U JPH0449807U JP H0449807 U JPH0449807 U JP H0449807U JP 9202390 U JP9202390 U JP 9202390U JP 9202390 U JP9202390 U JP 9202390U JP H0449807 U JPH0449807 U JP H0449807U
Authority
JP
Japan
Prior art keywords
frequency
displacement meter
laser displacement
light source
stabilized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9202390U
Other languages
English (en)
Other versions
JP2505823Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9202390U priority Critical patent/JP2505823Y2/ja
Publication of JPH0449807U publication Critical patent/JPH0449807U/ja
Application granted granted Critical
Publication of JP2505823Y2 publication Critical patent/JP2505823Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案のレーザ変位計の一実施例を示
す構成図、第２図は第１図装置に用いられる検出
器の出力を示す図、第３図は従来のレーザ変位計
の測定原理を示す構成図である。 １……半導体レーザ光源、２……恒温槽、３…
…コリメータレンズ、４……定電流源、５……ビ
ームスプリツタ、６……1/8波長板、７……参照
用コーナーキユーブ、８……測定用コーナーキユ
ーブ、９……偏光ビームスプリツタ、１０，１１
……検出器、１２……干渉位相測定部、１３……
白色ノイズ源。

Claims (1)

    【実用新案登録請求の範囲】
  1. 周波数安定化ＬＤ光源とマイケルソンの干渉計
    を用いた位相差方式のレーザ変位計において、前
    記周波数安定化光源の駆動電流に高周波重畳を行
    える白色ノイズ源を備えた構成としたことを特徴
    とするレーザ変位計。
JP9202390U 1990-08-31 1990-08-31 レ―ザ変位計 Expired - Fee Related JP2505823Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9202390U JP2505823Y2 (ja) 1990-08-31 1990-08-31 レ―ザ変位計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9202390U JP2505823Y2 (ja) 1990-08-31 1990-08-31 レ―ザ変位計

Publications (2)

Publication Number Publication Date
JPH0449807U true JPH0449807U (ja) 1992-04-27
JP2505823Y2 JP2505823Y2 (ja) 1996-08-07

Family

ID=31828168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9202390U Expired - Fee Related JP2505823Y2 (ja) 1990-08-31 1990-08-31 レ―ザ変位計

Country Status (1)

Country Link
JP (1) JP2505823Y2 (ja)

Also Published As

Publication number Publication date
JP2505823Y2 (ja) 1996-08-07

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