JPH1092811A5 - - Google Patents

Info

Publication number
JPH1092811A5
JPH1092811A5 JP1997184946A JP18494697A JPH1092811A5 JP H1092811 A5 JPH1092811 A5 JP H1092811A5 JP 1997184946 A JP1997184946 A JP 1997184946A JP 18494697 A JP18494697 A JP 18494697A JP H1092811 A5 JPH1092811 A5 JP H1092811A5
Authority
JP
Japan
Prior art keywords
wiring layer
uppermost
insulating film
interlayer insulating
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997184946A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1092811A (ja
JP4222525B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP18494697A priority Critical patent/JP4222525B2/ja
Priority claimed from JP18494697A external-priority patent/JP4222525B2/ja
Publication of JPH1092811A publication Critical patent/JPH1092811A/ja
Publication of JPH1092811A5 publication Critical patent/JPH1092811A5/ja
Application granted granted Critical
Publication of JP4222525B2 publication Critical patent/JP4222525B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP18494697A 1996-07-12 1997-07-10 半導体装置、その製造方法及び反射型液晶表示装置 Expired - Lifetime JP4222525B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18494697A JP4222525B2 (ja) 1996-07-12 1997-07-10 半導体装置、その製造方法及び反射型液晶表示装置

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP8-183152 1996-07-12
JP18315296 1996-07-12
JP18903796 1996-07-18
JP8-189037 1996-07-18
JP18494697A JP4222525B2 (ja) 1996-07-12 1997-07-10 半導体装置、その製造方法及び反射型液晶表示装置

Publications (3)

Publication Number Publication Date
JPH1092811A JPH1092811A (ja) 1998-04-10
JPH1092811A5 true JPH1092811A5 (de) 2005-05-12
JP4222525B2 JP4222525B2 (ja) 2009-02-12

Family

ID=27325259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18494697A Expired - Lifetime JP4222525B2 (ja) 1996-07-12 1997-07-10 半導体装置、その製造方法及び反射型液晶表示装置

Country Status (1)

Country Link
JP (1) JP4222525B2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032780A (ja) * 2006-07-26 2008-02-14 Seiko Epson Corp 電気光学装置の製造方法、及び電気光学装置、並びに電子機器
KR100889553B1 (ko) * 2007-07-23 2009-03-23 주식회사 동부하이텍 시스템 인 패키지 및 그 제조 방법
JP5291917B2 (ja) * 2007-11-09 2013-09-18 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
JP2015114433A (ja) * 2013-12-10 2015-06-22 富士通セミコンダクター株式会社 半導体装置及び半導体装置の製造方法
JP6493955B2 (ja) * 2014-10-09 2019-04-03 ラピスセミコンダクタ株式会社 半導体装置及び半導体装置の製造方法

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