JPS5361271A - Diffusion method for high concentration impurity - Google Patents

Diffusion method for high concentration impurity

Info

Publication number: JPS5361271A
Authority: JP; Japan
Prior art keywords: high concentration; concentration impurity; diffusion method; oxide film; impurity
Prior art date: 1976-11-12
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP13535276A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5522937B2 (2

Inventor

Toshiaki Kitahara

Keizo Inaba

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1976-11-12

Filing date

1976-11-12

Publication date

1978-06-01

1976-11-12 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1976-11-12 Priority to JP13535276A priority Critical patent/JPS5361271A/ja

1978-06-01 Publication of JPS5361271A publication Critical patent/JPS5361271A/ja

1980-06-19 Publication of JPS5522937B2 publication Critical patent/JPS5522937B2/ja

Status Granted legal-status Critical Current

Links

238000009792 diffusion process Methods 0.000 title abstract 3
239000012535 impurity Substances 0.000 title abstract 3
OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
238000000151 deposition Methods 0.000 abstract 1
229910052698 phosphorus Inorganic materials 0.000 abstract 1
239000011574 phosphorus Substances 0.000 abstract 1
239000004065 semiconductor Substances 0.000 abstract 1

Landscapes

Crystals, And After-Treatments Of Crystals (AREA)

JP13535276A 1976-11-12 1976-11-12 Diffusion method for high concentration impurity Granted JPS5361271A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP13535276A JPS5361271A (en)	1976-11-12	1976-11-12	Diffusion method for high concentration impurity

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP13535276A JPS5361271A (en)	1976-11-12	1976-11-12	Diffusion method for high concentration impurity

Publications (2)

Publication Number	Publication Date
JPS5361271A true JPS5361271A (en)	1978-06-01
JPS5522937B2 JPS5522937B2 (2)	1980-06-19

Family

ID=15149740

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP13535276A Granted JPS5361271A (en)	1976-11-12	1976-11-12	Diffusion method for high concentration impurity

Country Status (1)

Country	Link
JP (1)	JPS5361271A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN104867820A (zh) *	2015-04-16	2015-08-26	株洲南车时代电气股份有限公司	一种高浓度n型浅结的制备方法

1976
- 1976-11-12 JP JP13535276A patent/JPS5361271A/ja active Granted

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN104867820A (zh) *	2015-04-16	2015-08-26	株洲南车时代电气股份有限公司	一种高浓度n型浅结的制备方法

Also Published As

Publication number	Publication date
JPS5522937B2 (2)	1980-06-19

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